Method for making high speed, high areal density inductive write structure
View Patent ↗An inductive write element is disclosed for use in a magnetic data recording system. The write element provides increased data rate and data density capabilities through improved magnetic flux flow through the element. The write element includes a magnetic yoke constructed of first and second magnetic poles. The first pole includes a pedestal constructed of a high magnetic moment (high B sat ) material, which is preferably FeRhN nanocrystalline films with lamination layers of CoZrCr. The second pole includes a thin inner layer of high B sat material (also preferably FeRhN nanocrystalline films with lamination layers of CoZrCr), the remainder being constructed of a magnetic material capable of being electroplated, such as a Ni—Fe alloy. An electrically conductive coil passes through the yoke between the first and second poles to induce a magnetic flux in the yoke when an electrical current is caused to flow through the coil. Magnetic flux in the yoke produces a fringing field at a write gap whereby a signal can be imparted onto a magnetic medium passing thereby.
1. A method for constructing an inductive write structure for use in a magnetic data recording system, comprising:
forming a first magnetic pole of a magnetic material;
depositing a first insulation layer;
depositing a layer of dielectric write gap material;
forming an electrically conductive coil;
depositing a second insulation layer:
curing said second insulation layer;
forming a thin layer of high magnetic moment material, by sputter depositing a lamina of FeXN, X being selected from the group of materials consisting of Rh, Ta, Al, Ti, and Zr, and sputter depositing a lamina of a cobalt based ferromagnetic amorphous alloy;
masking the thin layer of high magnetic moment material in a pattern corresponding to a second pole;
plating a magnetic material in the pattern of said second pole;
performing a first ion milling process, to remove at least a portion of the sputtered, high magnetic moment material not covered by the plated second pole; and
after forming the first magnetic pole:
forming a layer of a high magnetic moment material by sputter depositing onto said first pole;
masking the high magnetic moment material formed onto the first pole in a pattern corresponding to a pedestal to be formed on an end of the first pole; and
etching to remove said sputter deposited high magnetic moment material not covered by said mask to form said pedestal;
wherein forming the layer of the high magnetic moment material on said first pole comprises depositing at least one lamina of the high magnetic moment material and at least one lamina of a non-magnetic, dielectric material.
2. The method of claim 1 , further comprising:
depositing the mask at an end of said second pole;
performing a second ion milling process to remove a portion of said second pole at said end;
performing a reactive ion etching process to remove a portion of said dielectric write gap material layer; and
performing a third ion milling process to remove a material from said pedestal.
3. The method of claim 1 , further comprising,
following depositing the first insulation layer, polishing said first insulation layer using a chemical mechanical polishing process.
4. The method of claim 1 wherein plating the second pole magnetic material comprises plating a Ni—Fe alloy.
5. The method of claim 1 wherein plating the second pole magnetic material comprises plating to a material thickness about 2 um.
6. The method of claim 1 wherein forming the thin layer of high magnetic moment material comprises sputter depositing Rh.
7. The method of claim 1 wherein forming the thin layer of high magnetic moment material comprises sputter depositing Ta.
8. The method of claim 1 wherein forming the thin layer of high magnetic moment material comprises sputter depositing Al.
9. The method of claim 1 wherein forming the thin layer of high magnetic moment material comprises sputter depositing Ti.
10. The method of claim 1 wherein forming the thin layer of high magnetic moment material comprises sputter depositing Zr.
11. The method of claim 1 wherein forming the thin layer of high magnetic moment material comprises depositing the lamina of a high magnetic moment material and a lamina of CO 90 Zr 9 Cr.
12. The method of claim 1 wherein forming the high magnetic moment material onto the first pole comprises sputter depositing FeXN, X being selected from the group of materials consisting of Rh, Ta, Al, Ti, and Zr.
13. The method of claim 12 wherein forming the high magnetic moment material onto the first pole comprises sputter depositing a lamina of FeXN, and further comprises depositing a lamina of a cobalt based ferromagnetic amorphous alloy.
14. The method of claim 12 wherein forming the high magnetic moment material onto the first pole further comprises depositing a lamina of Co 90 Zr 9 Cr.
15. The method of claim 12 wherein forming the high magnetic moment material onto the first pole comprises depositing Rh.
16. The method of claim 12 wherein forming the high magnetic moment material onto the first pole comprises depositing Ta.
17. The method of claim 12 wherein forming the high magnetic moment material onto the first pole comprises depositing Al.
18. The method of claim 12 wherein forming the high magnetic moment material onto the first pole comprises depositing Ti.
19. The method of claim 12 wherein forming the high magnetic moment material onto the first pole comprises depositing Zr.
20. A method for constructing an inductive write structure for use in a magnetic data recording system, comprising:
forming a first magnetic pole of a magnetic material;
depositing a first insulation layer;
depositing a layer of dielectric write gap material;
forming an electrically conductive coil;
depositing a second insulation layer;
curing said second insulation layer;
forming a thin layer of high magnetic moment material, by sputter depositing a lamina of FeXN, X being selected from the group of materials consisting of Rh, Ta, Al, Ti, and Zr, and sputter depositing a lamina of a cobalt based ferromagnetic amorphous alloy;
masking the thin layer of high magnetic moment material in a pattern corresponding to a second pole;
plating a magnetic material in the pattern of said second pole;
performing a first ion milling process, to remove at least a portion of the sputtered, high magnetic moment material not covered by the plated second pole;
after forming the first magnetic pole:
forming a layer of a high magnetic moment material onto said first pole;
masking the high magnetic moment material formed onto the first pole in a pattern corresponding to a pedestal to be formed on an end of the first pole; and
etching to remove said sputter deposited high magnetic moment material not covered by said mask to form said pedestal;
depositing the mask at an end of said second pole;
performing a second ion milling process to remove a portion of said second pole at said end;
performing a reactive ion etching process to remove a portion of said dielectric write gap material layer; and
performing a third ion milling process to remove a material from said pedestal.