Carbide emitter mask etch stop
View Patent ↗Bipolar transistors and methods for fabricating bipolar transistors are disclosed wherein an emitter-base dielectric stack is formed between emitter and base structures, comprising a carbide layer situated between first and second oxide layers. The carbide layer provides an etch stop for etching the overlying oxide layer, and the underlying oxide layer provides an etch stop for etching the carbide layer to form an emitter-base contact opening.
1. A bipolar transistor, comprising:
a collector region;
a base region formed in a base layer overlying the collector region;
an emitter-base dielectric stack overlying the base layer and having an opening therein exposing a portion of the base layer, the emitter-base dielectric stack comprising a carbide layer;
an oxide layer resistive to a carbide-dry-etching process, overlying the carbide layer; and
an emitter poly layer overlying the emitter-base dielectric stack and an exposed portion of the base layer.
2. The transistor of claim 1 , wherein the emitter-base dielectric stack comprises:
a first oxide layer overlying the base region of the base layer; and
the carbide layer overlying the first oxide layer.
3. The transistor of claim 2 , wherein the first oxide layer comprises:
a thermal silicon oxide layer overlying the base layer and having a thickness between about 20 Å and about 50 Å; and
a deposited silicon oxide overlying the thermal silicon oxide layer and having a thickness of about 50 Å.
4. The transistor of claim 2 , wherein the first oxide layer comprises a first silicon oxide overlying the base layer and having a thickness between about 70 Å and about 100 Å.
5. The transistor of claim 2 , wherein the carbide layer comprises a silicon carbide layer overlying the first oxide layer.
6. The transistor of claim 5 , wherein the thickness of the silicon carbide layer is about 100 Å.
7. The transistor of claim 5 , further comprises a second silicon oxide overlying the carbide layer and having a thickness between about 500 Å and about 1000 Å.
8. A bipolar transistor, comprising:
a collector region;
a base region formed in a base layer overlying the collector region; and
an emitter-base dielectric stack overlying the base layer and having an opening therein exposing a portion of the base layer, the emitter-base dielectric stack including
a thermal oxide layer overlying the based layer having a thermal-oxide thickness;
a first deposited oxide layer overlying the thermal oxide layer having a first thickness;
a carbide layer resistive to an oxide-layer-dry-etching process, overlying the first oxide layer, having a carbide-layer thickness;
a second deposited oxide layer, having a favorable dry-etching selectivity with respect to the carbide layer, overlying the carbide layer, having a second thickness;
the carbide-layer thickness sufficient as an etch-stop for the second deposited oxide layer; and
the second deposited-oxide thickness sufficient as a hard-mask for the carbide layer.