Thin film device and its fabrication method
View Patent ↗A thin film device includes a metal sulfide layer formed on a single crystal silicon substrate by epitaxial growth; and a compound thin film with ionic bonding, which is formed on the metal sulfide layer by epitaxial growth. Alternatively, a thin film device includes a metal sulfide layer formed on a single crystal silicon substrate by epitaxial growth; and at least two compound thin films with ionic bonding, which are formed on the metal sulfide layer by epitaxial growth. For example, (11 2 0) surface AlN/MnS/Si (100) thin films formed by successively stacking a MnS layer (about 50 nm thick) and an AlN layer (about 1000 nm thick) on a single crystal Si (100) substrate, are used as a substrate, and a (11 2 0) surface GaN layer (about 100 nm thick) operating as a light emitting layer is formed on the substrate, thereby fabricating a thin film device.
1. A thin film device comprising: a metal sulfide layer selected from the group consisting of manganese sulfide (MnS), magnesium sulfide (MgS), and calcium sulfide (CaS), which is formed on a single crystal silicon substrate; and a thin film comprising an ionic compound, which is formed on the metal sulfide layer, wherein said single crystal silicon is a single crystal silicon (100), and said ionic compound thin film is an aluminum nitride (AlN) having a (1120) surface as its top surface.
2. The thin film device as claimed in claim 1 , further comprising an ionic compound having a (1120) thin film, which has a (1120) surface formed by epitaxial growth as its top surface, and is formed on said aluminum nitride (AlN) layer having the (1120) surface as its top surface, or via another intermediate layer.
3. The thin film device as claimed in claim 2 , wherein said compound thin film comprises a gallium nitride (GaN) thin film having a (1120) surface as its top surface.