Semiconductor devices and methods of making the devices
View Patent ↗A semiconductor plastic package, more particularly a preferred package structure and method for making a BGA package. A resin sealed BGA package where a supporting frame which fixedly supports semiconductor parts; i.e., an IC chip, a circuit board, or a circuit film, is sealed with resin, using a mold which is composed of an upper mold half and a lower mold half with the lower mold half having a plurality of projections, one at a position corresponding to each of the external terminals. The mold has a divisional structure which has an air vent between the divisional elements thereof.
1. A method of manufacturing a semiconductor device, comprising the steps of:
electrically connecting together each of a plurality of semiconductor chips with a respective base member having a circuit wiring; and
resin-sealing said plurality of said semiconductor chips at a time,
wherein said step of resin-sealing is carried out after positioning a frame that supports said base member between an upper half of a mold and a lower half thereof.
2. The manufacturing method according to claim 1 , further comprising the step of forming solder bumps on said resin-sealed semiconductor chip.
3. The manufacturing method according to claim 2 , further comprising the step of separating individual ones of said plurality of semiconductor chips.
4. The manufacturing method according to claim 3 , wherein said step of resin-sealing is conducted in such a manner that a surface on which said solder bumps are formed is resin-free.
5. The manufacturing method according to claim 1 , wherein said base member includes an insulating base member and wiring patterns formed on first and second opposing surfaces of said insulating base member, said wiring patterns on said first and second surfaces of said insulating base member are electrically connected to each other, said semiconductor chip is mounted on said first surface of said base member, and solder bumps are formed on the second surface of said base member.
6. The manufacturing method according to claim 1 , wherein in said resin-sealing step, said plurality of semiconductor chips are transfer molded.
7. The manufacturing method according to claim 1 , wherein in said step of electrically connecting together said semiconductor chips and said base members, each of said semiconductor chip and base member are connected by a wire bonding, no electrical connection is made between said frame and said semiconductor chips, and no electrical connection is made between said frame and said base members.
8. The manufacturing method according to claim 1 , wherein said base member is a multi-layered circuit board.
9. The manufacturing method according to claim 1 , wherein said base member is a circuit film.