IP Library Patent Application 10680960
Patent Application Utility
App. No. 10/680,960 · Confirmation No. 6075

Photoresist coating process for microlithography

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2009-01-26 ABN Abandonment 2 View
2008-07-09 CTFR Final Rejection 14 View
2008-07-09 SRNT Examiner's search strategy and results 1 View
2008-07-09 SRFW Search information including classification, databases and other search related notes 1 View
2008-03-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-03-10 SPEC Specification 1 View
2008-03-10 CLM Claims 5 View
2008-03-10 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2008-03-10 WFEE Fee Worksheet (SB06) 2 View
2008-03-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-03-10 XT/ Extension of Time 2 View
2007-11-16 CTNF Non-Final Rejection 14 View
2007-11-16 892 List of references cited by examiner 1 View
2007-11-16 SRFW Search information including classification, databases and other search related notes 1 View
2007-11-13 SRNT Examiner's search strategy and results 2 View
2007-08-31 RCEX Request for Continued Examination (RCE) 1 View
2007-08-31 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-08-31 CLM Claims 5 View
2007-08-31 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2007-08-31 WFEE Fee Worksheet (SB06) 2 View
2007-08-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-08-31 WFEE Fee Worksheet (SB06) 1 View
2007-06-01 CTFR Final Rejection 10 View
2007-06-01 SRFW Search information including classification, databases and other search related notes 1 View
2007-05-29 SRNT Examiner's search strategy and results 1 View
2007-03-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2007-03-09 CLM Claims 4 View
2007-03-09 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2007-03-09 WFEE Fee Worksheet (SB06) 1 View
2006-12-11 CTNF Non-Final Rejection 10 View
2006-12-11 1449 List of References cited by applicant and considered by examiner 1 View
2006-12-11 892 List of references cited by examiner 1 View
2006-12-11 SRFW Search information including classification, databases and other search related notes 1 View
2006-12-04 SRNT Examiner's search strategy and results 4 View
2006-09-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2006-09-22 CLM Claims 4 View
2006-09-22 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-09-22 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-09-22 WFEE Fee Worksheet (SB06) 1 View
2006-06-20 CTNF Non-Final Rejection 7 View
2006-06-20 1449 List of References cited by applicant and considered by examiner 2 View
2006-06-20 892 List of references cited by examiner 1 View
2006-06-20 SRFW Search information including classification, databases and other search related notes 1 View
2006-06-14 SRNT Examiner's search strategy and results 9 View
2005-07-18 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-07-18 FOR Foreign Reference 11 View
2005-03-14 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-03-14 FOR Foreign Reference 1 View
2005-03-14 FOR Foreign Reference 37 View
2003-10-07 TRNA Transmittal of New Application 5 View
2003-10-07 SPEC Specification 14 View
2003-10-07 CLM Claims 3 View
2003-10-07 ABST Abstract 1 View
2003-10-07 DRW Drawings-only black and white line drawings 4 View
2003-10-07 OATH Oath or Declaration filed 3 View
2003-10-07 WFEE Fee Worksheet (SB06) 1 View
2003-10-07 WFEE Fee Worksheet (SB06) 1 View
2003-10-07 136A Authorization for Extension of Time all replies 5 View
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Quick Facts
App. No.
10/680,960
Filed
2003-10-07
Pub. No.
US20050074552A1
Art Unit
1795