Magnetic recording head and fabrication process
View Patent ↗Disclosed are a thin-film magnetic recording head suitable for high density recording and its fabrication method elaborated to avoid corrosion of the main pole section of the head. A non-magnetic metal layer is formed on the top of the main pole.
1. A method of fabricating a magnetic head comprising a single pole type head which includes a main pole and a return pole, said method comprising the steps of:
forming a magnetic layer which is processed to be said main pole;
forming a first non-magnetic metal layer and a non-magnetic insulator layer in order on said magnetic layer;
forming a first mask of a resist layer on said non-magnetic insulator layer;
shaping said non-magnetic insulator layer by reactive ion etching, using said first mask, thus forming a second mask; and
shaping said magnetic layer into a designed shape of said main pole, using the second mask.
2. The method of fabricating a magnetic head according to claim 1 , wherein said magnetic layer is a FeCo layer, a CoNiFe layer, or a multilayered film consisting of FeCo and non-magnetic layers and etching gas that is used for said reactive ion etching includes Cl 2 or BCl 3 .
3. The method of fabricating a magnetic head according to claim 2 , wherein said first non-magnetic metal layer is made of NiCr, Cr, Ta, or TaW and said non-magnetic insulator layer is made of Al 2 O 3 .
4. The method of fabricating a magnetic head according to claim 1 , wherein said first non-magnetic metal layer has a thickness falling within a range of 5–30 nm.