Organic electroluminescent device with self-aligned insulating fillers and method for manufacturing the same
View Patent ↗In an organic electroluminescent device, a plurality of striped lower electrodes are formed on an insulating substrate along a first direction, and a plurality of fillers made of amorphous carbon are filled between the lower electrodes. Organic thin film layers including an emitting layer is formed on the fillers and the lower electrodes. A plurality of striped upper electrodes are formed on the organic thin film layer along a second direction different from the first direction.
1. A method for manufacturing an organic electroluminescent device, comprising the steps of:
forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements a first direction on said conductive layer;
etching said conductive layer by a dry etching process using a first plasma gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;
depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a second plasma gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;
forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.
2. The method as set forth in claim 1 , wherein a condition for introducing said first plasma gas is the same as a condition for introducing said second plasma gas.
3. The method as set forth in claim 2 , wherein each of said first and second plasma gas includes hydrocarbon gas.
4. The method as set forth in claim 1 , wherein a condition for introducing said first plasma gas is different from a condition for introducing said second plasma gas.
5. The method as set forth in claim 4 , wherein said first plasma gas includes halogen gas, and said second plasma gas includes hydrocarbon gas.
6. The method as set forth in claim 1 , wherein said lower electrodes are anodes and said upper electrodes are cathodes.
7. The method as set forth in claim 6 , further comprising a step of forming a hole-transporting layer between said lower electrodes and said emitting layer.
8. The method as set forth in claim 6 , further comprising a step of forming an electron-transporting layer between said emitting layer and said upper electrodes.
9. The method as set forth in claim 1 , wherein said insulating substrate is transparent and said lower electrodes comprise transparent conductive layers.
10. The method as set forth in claim 9 , wherein said transparent conductive layers comprise indium tin oxide.
11. The method as set forth in claim 1 , wherein said first direction is approximately normal to said second direction.
12. The method as set forth in claim 1 , wherein said insulating layer comprises amorphous carbon.
13. A method for manufacturing an organic electroluminescent device, comprising the steps of:
forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements alone a first direction on said conductive layer;
etching said conductive layer by a dry etching process using gas including hydrocarbon gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes, and subsequently depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using said gas including hydrocarbon gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer,
forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.
14. A method for manufacturing an organic electroluminescent device, comprising the steps of:
forming a conductive layer on an insulating substrate;
forming a photoresist pattern layer having a plurality of striped elements along a first direction on said conductive layer;
etching said conductive layer by a dry etching process using a gas including halide gas and using said photoresist pattern layer as an etching mask in a chamber to form striped lower electrodes;
depositing an insulating layer on said photoresist pattern layer and on said insulating substrate between said lower electrodes by a plasma deposition process using a gas including hydrocarbon gas in said chamber;
performing a lift-off operation upon said photoresist pattern layer to remove said photoresist pattern layer and a part of said insulating layer on said photoresist pattern layer;
forming at least one organic thin film layer including an emitting layer on said insulating layer and said lower electrodes; and
forming a plurality of striped upper electrodes on said organic thin film layer along a second direction different from said first direction.