Use of oxygen-containing gases in fabrication of granular perpendicular magnetic recording media

1. A method of manufacturing granular perpendicular magnetic recording media, comprising sequential steps of:

(a) providing a non-magnetic substrate including a surface;

(b) forming a layer stack on said surface of said substrate, said layer stack including a granular perpendicular magnetic recording layer having an exposed upper surface;

(c) generating a plasma containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element; and

(d) treating said exposed upper surface of said granular perpendicular magnetic recording layer with said plasma to form an oxidized surface layer.

2. The method according to claim 1 , wherein:

step (a) comprises providing a non-magnetic substrate comprised of a non-magnetic material selected from the group consisting: of Al, NiP-plated Al, Al—Mg alloys, Al-based alloys, non-magnetic metals, non-magnetic alloys, glass, ceramics, polymers, glass-ceramics, and composites and/or laminates of the aforementioned materials.

3. The method according to claim 1 , wherein:

step (b) comprises forming a layer stack including a granular Co-based alloy perpendicular magnetic recording layer comprised of a CoPtX alloy, where X=at least one element or material selected from the group consisting of: Cr, Ta, B, Mo, V, Nb, W, Zr, Re, Ru, Cu, Ag, Hf, Ir, Y, O, Si, Ti, N, P, Ni, SiO 2 , SiO, Si 3 N 4 , Al 2 O 3 , AlN, TiO, TiO 2 , TiO x , TiN, TiC, Ta 2 O 5 , NiO, and CoO, and wherein Co-containing magnetic grains with hcp lattice structure are segregated by grain boundaries comprising at least one of oxides, nitrides, and carbides.

4. The method according to claim 1 , wherein:

step (b) comprises forming a layer stack including a granular Co-based alloy perpendicular magnetic recording layer comprised of a CoPtX alloy, where X=at least one element or material selected from the group consisting of: Cr, Ta, B, Mo, V, Nb, W, Zr, Re, Ru, Cu, Ag, Hf, Ir, Y, O, Si, Ti, N, P, Ni, SiO 2 , SiO, Si 3 N 4 , Al 2 O 3 , AlN, TiO, TiO 2 , TiO x , TiN, TiC, Ta 2 O 5 , NiO, and CoO, and wherein Co-containing magnetic grains with hcp lattice structure are segregated by grain boundaries comprising oxides.

5. The method according to claim 4 , wherein:

step (b) comprises forming said granular Co-based alloy perpendicular magnetic recording layer by reactively sputtering a target comprised of said CoPtX alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element.

6. The method according to claim 5 , wherein:

step (b) comprises forming said granular Co-based alloy perpendicular magnetic recording layer by reactively sputtering a target comprised of said CoPtX alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas selected from the group consisting of: nitrogen oxides, sulfur oxides, and carbon oxides.

7. The method according to claim 6 , wherein:

step (b) comprises forming said granular Co-based alloy perpendicular magnetic recording layer by reactively sputtering a target comprised of said CoPtX alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas selected from the group consisting of: NO, NO 2 , N 2 O, N 2 O 4 , SO 2 , CO, and CO 2 .

8. The method according to claim 1 , wherein:

step (c) comprises generating said plasma containing at least one ionized oxygen species from a source gas selected from the group consisting of: nitrogen oxides, sulfur oxides, and carbon oxides.

9. The method according to claim 8 , wherein:

step (c) comprises generating said plasma containing at least one ionized oxygen species from a source gas selected from the group consisting of: NO, NO 2 , N 2 O, N 2 O 4 , SO 2 , CO, and CO 2 .

10. The method according to claim 8 , wherein:

step (c) comprises generating a DC, RF, or microwave plasma.

11. A method of manufacturing granular perpendicular magnetic recording media, comprising sequential steps of:

(a) providing a non-magnetic substrate including a surface;

(b) forming a layer stack on said surface of said substrate, said layer stack including a granular perpendicular magnetic recording layer having an exposed upper surface and formed by reactively sputtering a target comprised of a magnetic alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element; and

(c) treating said exposed upper surface of said granular perpendicular magnetic recording layer with an oxygen-containing gas to form an oxidized surface layer.

12. The method according to claim 11 , wherein:

step (a) comprises providing a non-magnetic substrate comprised of a non-magnetic material selected from the group consisting: of Al, NiP-plated Al, Al—Mg alloys, other Al-based alloys, other non-magnetic metals, other non-magnetic alloys, glass, ceramics, polymers, glass-ceramics, and composites andlor laminates of the aforementioned materials.

13. The method according to claim 11 , wherein:

step (b) comprises forming a layer stack including a granular Co-based alloy perpendicular magnetic recording layer comprised of a CoPtX alloy, where X=at least one element or material selected from the group consisting of: Cr, Ta, B, Mo, V, Nb, W, Zr, Re, Ru, Cu, Ag, Hf, Ir, Y, O, Si, Ti, N, P, Ni, SiO 2 , SiO, Si 3 N 4 , Al 2 O 3 , AlN, TiO, TiO 2 , TiO x , TiN, TiC, Ta 2 O 5 , NiO, and CoO, and wherein Co-containing magnetic grains with hcp lattice structure are segregated by grain boundaries comprising oxides.

14. The method according to claim 13 , wherein:

step (b) comprises forming said granular Co-based alloy perpendicular magnetic recording layer by reactively sputtering a target comprised of said CoPtX alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas selected from the group consisting of: nitrogen oxides, sulfur oxides, and carbon oxides.

15. The method according to claim 14 , wherein: step (b) comprises forming said granular Co-based alloy perpendicular magnetic recording layer by reactively sputtering a target comprised of said CoPtX alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas selected from the group consisting of: NO, NO 2 , N 2 O, N 2 O 4 , SO 2 , CO, and CO 2 .

16. The method according to claim 11 , wherein:

step (c) comprises generating a plasma containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element, and treating said exposed upper surface of said granular perpendicular magnetic recording layer with said plasma to form said oxidized surface layer.

17. The method according to claim 16 , wherein:

step (c) comprises generating said plasma containing at least one ionized oxygen species from a source gas selected from the group consisting of: nitrogen oxides, sulfur oxides, and carbon oxides.

18. The method according to claim 17 , wherein:

step (c) comprises generating said plasma containing at least one ionized oxygen species from a source gas selected from the group consisting of: NO, NO 2 , N 2 O, N 2 O 4 , SO 2 , CO, and CO 2 .

19. The method according to claim 16 , wherein:

step (c) comprises generating a DC, RF, or microwave plasma.