Insert liner for chamber entrance
An insert liner for a passage has a hollow liner shielding the passage from accumulation of particles during a manufacturing operation, the insert liner resiliently expands inside the passage to secure the insert liner in the passage without fasteners, and the liner has a nonporous surface that accumulates the particles.
1 . An insert liner for a passage, comprising:
a hollow liner shielding the passage from accumulation of particles during a manufacturing operation, and the liner has a nonporous surface that accumulates the particles.
2 . The insert liner of claim 1 and further comprising:
a hollow sleeve secured in the passage without fasteners.
3 . The insert liner of claim 1 and further comprising:
a sleeve having a wide end that is resiliently collapsible to a smaller circumference for insertion into the passage.
4 . The insert liner of claim 1 and further comprising:
a sleeve that is resiliently expandable in the passage.
5 . The insert liner of claim 1 and further comprising:
a hollow sleeve resiliently biased against a surrounding passage interior wall.
6 . The insert liner of claim 1 and further comprising:
a slotted sleeve.
7 . The insert liner of claim 1 and further comprising:
a slotted sleeve extending from a rear of a lip flange on one end of the slotted sleeve.
8 . The insert liner of claim 1 and further comprising:
a sleeve resiliently collapsible to a smaller circumference and resiliently expandable in the passage.
9 . The insert liner of claim 1 and further comprising:
a sleeve resiliently collapsible to a smaller circumference and resiliently expandable in the passage; and
a lip flange on one end of the sleeve conforming to an interior of a chamber.
10 . The insert liner of claim 1 and further comprising:
a sleeve resiliently collapsible to a smaller circumference and resiliently expandable in the passage;
the sleeve having sleeve sections that are resiliently pivotable toward and away from one another; and
a lip flange on one end of the sleeve conforming to an interior of a chamber.
11 . A method of shielding a passage from deposition of particles during a manufacturing operation, comprising the steps of:
inserting an insert liner in the passage; and
shielding the passage with a nonporous surface of the insert liner to accumulate particles on the nonporous surface during a manufacturing operation.
12 . The method as recited in claim 11 , further comprising the step of:
securing the insert liner in the passage without fasteners.
13 . The method as recited in claim 11 , further comprising the steps of:
securing the insert liner in the passage without fasteners; and
removing the insert liner together with particles having accumulated on the insert liner.
14 . The method as recited in claim 11 , further comprising the steps of:
securing the insert liner in the passage without fasteners;
removing the insert liner together with particles having accumulated on the insert liner; and
replacing the insert liner with a duplicate insert liner.
15 . The method as recited in claim 11 , further comprising the steps of:
resiliently collapsing the insert liner to a smaller circumference; and
resiliently expanding the insert liner inside the passage to secure the insert liner in the passage.
16 . The method as recited in claim 11 , further comprising the steps of:
resiliently collapsing the insert liner to a smaller circumference;
resiliently expanding the insert liner inside the passage to secure the insert liner in the passage without fasteners; and
removing the insert liner from the passage together with particles accumulated on the insert liner during a manufacturing operation.
17 . A method of using an insert liner, comprising:
assembling a hollow insert liner in a passage of a deposition chamber;
depositing a material on a workpiece that is transported along the passage to the chamber;
collecting particles of the material on a nonporous surface of the insert liner while the insert liner prevents accumulation of particles of the material on an interior of the passage.
18 . The method of claim 17 , further comprising:
removing the insert liner from the passage together with accumulated particles of the material; and
replacing the insert liner with a duplicate insert liner.
19 . The method of claim 17 , further comprising:
securing the insert liner in the passage without fasteners.
20 . The method as recited in claim 17 , further comprising:
securing the insert liner in the passage without fasteners; and
removing the insert liner together with accumulated particles of the material.
21 . The method as recited in claim 17 , further comprising the steps of:
resiliently collapsing the insert liner to a smaller circumference; and
resiliently expanding the insert liner inside the passage to secure the insert liner in the passage.
22 . The method as recited in claim 17 , further comprising the steps of:
resiliently collapsing the insert liner to a smaller circumference;
resiliently expanding the insert liner inside the passage to secure the insert liner in the passage without fasteners; and
removing the insert liner from the passage together with accumulated particles of the material.