Microfocus X-ray tube
View Patent ↗A microfocus X-ray tube is provided, and comprises a head that during operation of the X-ray tube faces an object that is to be inspected. The head has an outer surface with a cross-section that tapers toward a free end of the head. A target is disposed on or in the head. A mechanism is provided for forming an electron beam adapted to bombard the target, and forms the electron beam such that the X-ray tube has a focus with a diameter of ≦200 μm. The target has an outer surface with a cross-section that tapers toward an end of the target that during the operation of the X-ray tube faces an object that is to be inspected. A collimator can be provided for the target and also has an outer surface with a cross-section that tapers toward an end of the collimator that during operation of the X-ray tube faces an object that is to be inspected.
1. A microfocus x-ray tube for inspecting an object, comprising:
a head that during operation of the x-ray tube faces an object that is to be inspected, wherein said head has an outer surface with a cross-section that tapers toward a free end of said head;
a target disposed on or in said head, wherein said target is a transmission target, wherein said outer surface of said head is formed at least partially by said target or by a collimator that in a direction of irradiation is disposed ahead of said target, wherein said target is hollow, and wherein said target terminates in a vertex; and
means for forming an electron beam adapted to bombard said target, wherein said means form said electron beam such that said x-ray tube has a focus with a diameter of ≦200 μm.
2. A microfocus X-ray tube according to claim 1 , wherein said focus has a diameter of the ≦10 μm.
3. A microfocus X-ray tube according to claim 1 , wherein said outer surface of said head is essentially rotationally symmetrical.
4. A microfocus X-ray tube according to claim 3 , wherein said outer surface of said head is essentially conical.
5. A microfocus X-ray tube according to claim 4 , wherein said essentially conical outer surface of said head has an opening angle of less than 50°.
6. A microfocus X-ray tube according to claim 4 , wherein said head is provided with at least two regions, disposed one after the other in an axial direction, having different opening angles of the conical outer surface.
7. A microfocus X-ray tube according to claim 1 , wherein said outer surface of said head, in a direction of irradiation, is formed at least partially by a holder for said target.