Semiconductor device structure
View Patent ↗A semiconductor device includes a conductive layer with a plurality of wires, and a bonding pad formed in a region overlapping with the plurality of wires of the conductive layer. One of the wires is connected to the bonding pad, and an insulating protective film is formed between the remaining wires and the bonding pad. The protective film is bridged between adjacent wires at least in a region overlapping with the bonding pad. As a result, the protective film on the wires forms a bridge structure, which is effective in preventing cracking at a lower portion of the protective film. Further, a void formed underneath the bridged portion serves as an air spring to prevent damage to the structural elements, such as the wires, formed under the protective film. Further, because a polyimide film, which serves as a shock absorber, is not required, working efficiency can be improved and chip cost can be reduced.
1. A semiconductor device comprising:
a conductive layer with a plurality of wires; and
a bonding pad formed in a region overlapping the plurality of wires,
wherein:
one of the plurality of wires is connected to the bonding pad, and a protective film with an insulating property is formed between remaining ones of the plurality of wires and the bonding pad; and
the protective film bridges adjacent ones of said remaining ones of the plurality of wires at least in a region overlapping with the bonding pad so that a void is formed in the protective film between the adjacent ones of said remaining ones of the plurality of wires.
2. The semiconductor device as set forth in claim 1 , wherein an insulating film is formed between the protective film and the bonding pad, so as to cover the protective film.
3. The semiconductor device as set forth in claim 2 , wherein the insulating film is an oxide film formed by a chemical vapor deposition method.
4. The semiconductor device as set forth in claim 3 , wherein the oxide film contains at least one of boron and phosphor.
5. The semiconductor device as set forth in claim 1 ,
wherein the conductive layer comprises a second wiring layer that is formed on a semiconductor substrate having an active region where a semiconductor element is formed, and on a first wiring layer, via an interlayer insulating film, that is electrically connected to the active region, and
wherein the bonding pad is formed to overlap at least partially with the active region.
6. The semiconductor device of claim 1 , wherein a void is formed in the protective film at least between adjacent first and second of the remaining ones of the plurality of wires in a region overlapping with the bonding pad.
7. A semiconductor device comprising:
a conductive layer with a plurality of wires; and
a bonding pad formed in a region overlapping with the plurality of wires of the conductive layer,
wherein:
at least one of the plurality of wires is connected to the bonding pad, and a protective film with an insulating property is formed between remaining ones of the plurality of wires and the bonding pads;
the protective film formed on said remaining ones of the plurality of wires is bridged between adjacent ones of said remaining ones of the plurality of wires at least in a region overlapping with the bonding pad; and
in a region where the protective film is bridged, a minimum value S 1 of wire distance between adjacent ones of said remaining ones of the plurality of wires, and/or a length L 1 of a bridged portion of the protective film are adjusted to suppress scattering and spouting at a void formed by the bridging of the protective film.
8. The semiconductor device as set forth in claim 7 , wherein the minimum value S 1 of wire distance and/or the length L 1 of the bridged portion are adjusted so that the minimum value S 1 is not less than 1.8 μm, and the length L 1 is not more than 900 μm, or the minimum value S 1 of wire distance and/or the length L 1 of the bridged portion are adjusted so that the minimum value S 1 is within a range of from not less than 1.2 μm to less than 1.8 μm, and the length L 1 is not more than 1400 μm.
9. The semiconductor device as set forth in claim 8 , wherein the minimum value S 1 of wire distance and/or the length L 1 of the bridged portion are adjusted so that the minimum value S 1 is not less than 1.8 μm, or the length L 1 of the bridged portion is not more than 400 μm.
10. The semiconductor device as set forth in claim 7 , wherein the minimum value S 1 and/or the length L 1 are adjusted in a region other than the region overlapping with the bonding pad.
11. A semiconductor device comprising:
a conductive layer with a plurality of wires; and
a bonding pad formed in a region at least partially overlapping with the plurality of wires of the conductive layer,
wherein:
at least one of the plurality of wires is connected to the bonding pad, and a protective film with an insulating property is formed between remaining ones of the plurality of wires and the bonding pad; and
the protective film formed on said remaining ones of the plurality of wires is bridged between adjacent ones of said remaining ones of the plurality of wires at least in a region overlapping with the bonding pad so that a void is formed in the protective film at least between adjacent first and second of the remaining ones of the plurality of wires at least in a region overlapping with the bonding pad.