Semiconductor device and its manufacture
View Patent ↗In a logic area, impurities are doped into the gate electrode and the source/drain diffusion regions of a MIS transistor. Thereafter in a memory cell area, word lines are patterned, source/drain regions are formed, and contact holes are formed. Side wall spacers of the MIS transistor in the logic area are made of silicon oxide. A semiconductor device of logic-memory can be manufactured by a reduced number of manufacture processes while the transistor characteristics are stabilized and the fine patterns in the memory cell are ensured.
1. A semiconductor device, comprising:
a semiconductor substrate including first and second areas;
a plurality of first conductive patterns formed in the first area;
a plurality of second conductive patterns formed in the second area, said second conductive pattern having a structure different from said first conductive pattern;
first, second, third and fourth insulating films formed on said second conductive pattern, first insulating film having a same pattern as said second conductive pattern, said second, said third and fourth insulating films having a different pattern from said second conductive pattern; and
fifth and sixth insulating films made of same materials as said third and fourth insulating films, formed directly on the first conductive pattern, and having a different pattern from said first conductive pattern.
2. A semiconductor device according to claim 1 , further comprising side spacers formed on side walls of said first conductive pattern, said side spacer made of same material as said second insulating film.
3. A semiconductor device according to claim 2 , further comprising:
first source/drain regions formed in a surface layer of said semiconductor substrate on both sides of each said first conductive pattern, said first source/drain regions formed with a silicide layer; and second source-drain regions formed in a surface layer of said semiconductor substrate on both sides of each said second conductive pattern, said second source/drain regions not formed with a silicide layer.