Method of manufacturing a semiconductor device and a method for fixing the semiconductor device using substrate jig
View Patent ↗The present invention relates to a method of manufacturing a semiconductor substrate including the back grind step, the dicing step, the pick up step, and the die bonding step of the wafer; and to a semiconductor substrate jig used in such method. The object of the present invention is to mitigate the effect and to prevent damage caused by the lack of strength in thinned semiconductor substrates. A jig with an outer frame 21 , and a rubber film 22 arranged within the outer frame 21 and having increasing and decreasing body size while deforming its shape by supplying air therein are provided. As the volume of the rubber film 22 increases, the wafer-fixing jig 20 deforms the rubber film and allows the tapes 2 and 6 arranged between the wafer 1 and the rubber film 22 A to be pushed toward the wafer 1 gradually from the center outward. The attachment step, the back grind step, the tape reapplication step, the pick up step and the die bonding step are conducted using such wafer-fixing jig.
1. A semiconductor substrate jig used in arranging a film to a semiconductor substrate, wherein said semiconductor substrate jig comprises:
a frame;
a set table arranged within said frame;
a porous plate arranged within said frame on said set table;
a floor within said frame spaced from said set table on a side opposite said porous plate;
a rubber film enclosing said set table and porous plate; and
an air joint formed in said frame, passing through said floor and said set table, and provided for applying pressure to said porous plate within said rubber film.
2. The semiconductor substrate jig as defined in claim 1 , including a further vacuum hole passing through said floor and contacting an outside surface of said film.
3. The semiconductor substrate jig as defined in claim 1 , including guide shafts passing through said floor and through a wall of said film, movably journaled therewith and arranged to elevate said set table relative to said floor.
4. A semiconductor substrate jig as defined in claim 1 , including guide shafts passing through said floor and through a wall of said rubber film, movably journaled therewith and arranged to elevate said set table relative to said floor.