Thin film transistor manufacture method
View Patent ↗A Thin Film Transistor (TFT) manufacture method, comprising manufacture of a gate, a gate isolation layer, a channel layer, and a source/drain. Wherein, the manufacture of the channel layer comprises: forming a first a-Si layer by using a low deposition rate (LDR) (Chemical Vapor Deposition, CVD); forming a second a-Si layer by using a high deposition rate (HDR); and forming an N+Mixed a-Si layer. When the first a-Si layer is formed in the present invention, the flux ratio of H 2 /SiH 4 is adjusted to a range from 0.40 to 1.00 to increase the number of defects in the first a-Si layer. When the TFT is irradiated by the light, the photo leakage current generated in the channel layer is trapped in the defects in the first a-Si layer. Therefore, the TFT photo leakage current can be significantly reduced.
1. A method for forming a channel layer in a Thin Film Transistor (TFT), comprising:
providing a substrate;
forming a first a-Si layer on the substrate by using a Chemical Vapor Deposition (CVD) method, wherein the first a-Si layer is formed under a condition of a flux ratio of H 2 /SiH 4 being within a range from 0.40 to 1.00; and forming a second a-Si layer on the first a-Si layer by using the CVD method.
2. The method of claim 1 , wherein the second a-Si layer is formed under a condition of the flux ratio of H 2 /SiH 4 being within a range from 0.95 to 1.00.
3. The method of claim 1 , wherein a plurality of manufacture process conditions to form the first a-Si layer comprise:
a flux of SiH 4 is from 1000 to 4600 sccm;
a flux of H 2 is from 400 to 4600 sccm;
an operating pressure is from 0.75 to 1.00 mbar; and
a radio frequency (RF) power is from 70 to 100 W.
4. The method of claim 1 , wherein the manufacture process conditions to form the second a-Si layer comprise:
the flux of SiH 4 is from 1000 to 5700 sccm;
the flux of H 2 is from 950 to 5700 sccm;
the operating pressure is from 1.3 to 1.6 mbar; and
the radio frequency (RF) power is from 200 to 320 W.
5. The method of claim 1 , wherein a thickness of the first a-Si layer is from 100 to 500 angstroms.
6. The method of claim 1 , wherein a thickness of the second a-Si layer is from 1000 to 2000 angstroms.
7. The method of claim 1 , wherein a deposition rate of the first a-Si layer is smaller than the deposition rate of the second a-Si layer.
8. The method of claim 1 , wherein the first a-Si layer is thinner than the second a-Si layer.
9. A method of improves the photo leakage current problem of a Thin Film Transistor (TFT), the Thin Film Transistor having a channel layer including a first a-Si layer on a substrate and a second a-Si layer on the first a-Si layer, characterized in that:
making the first a-Si layer having more defects than an a-Si layer formed by CVD method under a condition of a flux ratio of H 2 /SiH 4 being 5.0.
10. The method of claim 9 , wherein the first a-Si layer is formed by using a Chemical Vapor Deposition (CVD) method under a condition of a flux ratio of H 2 /SiH 4 being within a range from 0.40 to 1.00.
11. The method of claim 10 , wherein a plurality of manufacture process conditions to form the first a-Si layer comprise:
a flux of SiH 4 is from 1000 to 4600 sccm;
a flux of H 2 is from 400 to 4600 sccm;
an operating pressure is from 0.75 to 1.00 mbar; and
a radio frequency (RF) power is from 70 to 100 W.
12. The method of claim 10 , wherein the first a-Si layer is formed by using a Chemical Vapor Deposition (CVD) method under a condition of a flux ratio of H 2 /SiH 4 being within a range from 0.95 to 1.00.
13. The method of claim 12 , wherein the manufacture process conditions to form the second a-Si layer comprise:
the flux of SiH 4 is from 1000 to 5700 sccm;
the flux of H 2 is from 950 to 5700 sccm;
the operating pressure is from 1.3 to 1.6 mbar; and
the radio frequency (RF) power is from 200 to 320 W.
14. The method of claim 12 , wherein a deposition rate of the first a-Si layer is smaller than the deposition rate of the second a-Si layer.
15. The method of claim 9 , wherein the first a-Si layer is thinner than the second a-Si layer.
16. The method of claim 9 , wherein a thickness of the first a-Si layer is from 100 to 500 angstroms.
17. The method of claim 16 , wherein a thickness of the second a-Si layer is from 1000 to 2000 angstroms.