Liquid crystal display substrate fabrication
In order to prevent exposure mismatch on a boundary between exposure regions that causes pattern connection defects (including stitch defects), exposure is performed twice or more on a whole exposure region of a glass substrate. The exposure method includes aligning a reticle in a scanning direction, exposing the reticle pattern onto the glass substrate, moving the glass substrate one-half of the width of the reticle, and exposing an exposure area twice by repeating the exposing and moving steps.
1. An exposure method for fabricating a liquid crystal display substrate, the method comprising the steps of:
aligning a reticle along a scanning direction, the reticle characterized by a reticle width and a reticle length and comprising a reticle pattern;
exposing the reticle pattern onto a portion of an exposure area on a substrate;
moving the substrate perpendicular to the scanning direction no greater than one-half of the reticle width; and
repeating the exposing and moving steps, thereby exposing an entirety of the exposure area at least twice.
2. The exposure method of claim 1 , where the reticle length is at least as wide as the exposure area.
3. The exposure method of claim 1 , where the exposing step is performed while the reticle and the substrate are moved simultaneously.
4. The exposure method of claim 3 , where the reticle and the substrate are moved in the same direction.
5. The exposure method of claim 1 , where the exposing step comprises the step of scanning the reticle along a longer axis direction of the reticle.
6. The exposure method of claim 1 , where the exposing step comprises illuminating along a length direction perpendicular to the scanning direction.
7. The exposure method of claim 1 , where the reticle pattern is repetitive.
8. The exposure method of claim 1 , where the exposing step comprises the step of equimultiple erect imaging to transcribe the reticle pattern onto the exposure region in 1:1 proportion.
9. The exposure method of claim 1 , wherein the moving step comprises the step of moving the substrate approximately one-half of the reticle width.