Substrate transfer system
View Patent ↗A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to determine a moving path of the auto guided vehicle, a plurality of process stages at which processes are conducted on a substrate during fabrication of the LCD device, and a host to control the cassette stocker, the auto guided vehicle and the process stages. At least one of the auto guided vehicle and the cassette stocker having a bar code reader.
1. A substrate transfer system for use in fabricating a liquid crystal display (LCD) device, comprising:
a cassette having a bar code;
a cassette stocker to store the cassette;
an auto guided vehicle having a bar code reader, the auto guided vehicle being able to transfer the cassette to a process stage within the substrate transfer system;
a moving path unit to determine a moving path of the auto guided vehicle, wherein the moving path unit includes a position detecting sensor to detect a position of the auto guided vehicle;
a plurality of process stages at which processes are conducted on a substrate during fabrication of the LCD device, wherein the position detecting sensor is installed in front of at least one of the plurality of process stages; and
a host to control the cassette stocker, the auto guided vehicle, and the process stages.
2. The system according to claim 1 , wherein the cassette stocker and the auto guided vehicle include a robot arm to load and unload the cassette.
3. The system according to claim 2 , wherein the robot arm has a bar code reader.
4. The system according to claim 1 , wherein the process stages respectively include a shelf to load and unload the substrate cassette and a sensor to detect a processed cassette.
5. The system according to claim 1 , wherein the moving path unit includes a rail.