CMP for corrosion-free CoFe elements for magnetic heads

1. A method of manufacture of magnetic heads which include CoFe elements using CMP, comprising:

A) providing magnetic heads which include CoFe elements;

B) providing a slurry including Al 2 O 3 and H 2 O 2 ;

C) adjusting the concentration of H 2 O 2 in said slurry to within a range of 6–12% by volume;

D) polishing said CoFe elements using said slurry; and

E) balancing mechanical polishing action.

2. The method of manufacture of magnetic heads of claim 1 , wherein C) includes: adjusting the table speed of a mechanical polisher to within a range of 55–90 rpm.

3. The method of manufacture of magnetic heads of claim 2 , wherein C) includes:

adjusting polishing pressure to within a range of 5–7 psi.

4. The method of manufacture of claim 1 , wherein:

said slurry of A) includes BTA (1H-benzotriazole).

5. The method of manufacture of claim 1 , wherein:

said slurry of A) includes Isothiazolone.

6. The method of manufacture of claim 1 , wherein:

the particle size of Al 2 O 3 is in the range of 50–500 nm.

7. The method of manufacture of claim 1 , wherein:

the pH of the slurry is in the range of 4–6.

8. A method of manufacture of magnetic heads which include CoFe elements using CMP, comprising:

A) providing magnetic heads which include both CoFe elements and Al 2 O 3 elements;

B) providing a slurry including Al 2 O 3 and H 2 O 2 ;

C) adjusting the concentration of H 2 O 2 in said slurry to within a range of 8–12% by volume;

D) polishing said CoFe elements and said Al 2 O 3 elements using said slurry; and

E) balancing mechanical polishing action.