Active matrix display device and manufacturing method thereof
View Patent ↗The present invention discloses a method of manufacturing an active matrix display device, comprising: a) forming a semiconductor layer on an insulating substrate; b) forming a gate insulating layer over the whole surface of the substrate while convering the semiconductor layer; c) forming a gate electrode on the gate insulating layer over the semiconductor layer; d) forming spacers on both side wall portions of the gate electrode while exposing both end portions of the semiconductor layer; e) ion-implaing a high-density impurity into the semiconductor layer to form high-density source and drain regions in the semiconductor layer; f) depositing sequentially a transparent conductive layer and a metal layer on the inter insulating layer; g) patterning the transparent conductive layer and the metal layer to form the source and drain electrodes, the source and drain electrodes directly contacting the high-density source and drain regions and having a dual-layered structure; h) forming a passivation layer over the whole surface of the substrate; i) etching the passivation layer and the metal layer to form an opening portion exposing a portions of the transparent conductive layer, thereby forming a pixel electrode; and j) performing a reflow process to cover the metal layer in the opening portion by the passivation layer.
1. An active matrix display device, comprising: an insulation substrate;
a thin film transistor formed on the insulation substrate, including a semiconductor layer where source/drain regions are formed, gate electrode and source/drain electrodes respectively connected to the source/drain regions;
an insulation film formed over the insulation substrate, having an opening portion; and
a pixel electrode as a lower electrode,
wherein the source/drain electrodes have a dual-layered structure of a transparent conductive layer and a metal layer, the metal layer being enclosed by the insulation film and formed on the transparent layer,
wherein the metal layer and the insulation film are etched for exposing a portion of the transparent conductive layer forming any one of the source/drain electrodes, and
wherein the pixel electrode extends from the portion of the transparent conductive layer forming any one of the source/drain electrodes and is exposed through the opening portion of the insulation film.
2. The active matrix display device according to claim 1 , wherein the insulation film is a passivation layer patterned to cover the metal layer of the source/drain electrodes.
3. The active matrix display device according to claim 1 , wherein the insulation film is a passivation layer reflowed to enclose the metal layer of the source/drain electrodes.
4. The active matrix display device according to claim 1 , further comprising an organic EL layer formed on a portion of the pixel electrode exposed through the opening portion, wherein the organic EL layer is insulated from the metal layer of the source/drain electrodes.