Image sensor for reduced dark current
View Patent ↗A method and structure for reducing dark current in an image sensor includes preventing unwanted electrons from being collected in the photosensitive region of the image sensor. In one embodiment, dark current is reduced by providing a deep n-type region having an n-type peripheral sidewall formed in a p-type substrate region underlying a pixel array region to separate the pixel array region from a peripheral circuitry region of the image sensor. The method and structure also provide improved protection from blooming.
1. A structure for isolating imaging areas of an image sensor, comprising:
a substrate having a first conductivity type region;
a pixel array region found on said substrate comprising a plurality of pixels each isolated by a surrounding trench isolation region;
a peripheral circuit region outside of said pixel array region;
a first region of a second conductivity type formed in said substrate between at least a portion of a pixel array region and said peripheral circuit region to isolate said portion of the pixel array region from said peripheral circuit region; and
a second region of said second conductivity type formed in said substrate in electrical communication with said first region of said second conductivity type and extending within a perimeter defined by said first region of said second conductivity type to define said pixel array region bordered by said first and second regions of said second conductivity type.
2. The structure of claim 1 wherein said image sensor is a CCD imager.
3. The structure of claim 1 wherein said image sensor is a CMOS imager.
4. The structure of claim 1 wherein said first conductivity type region comprises an epitaxial layer.
5. The structure of claim 1 wherein said second region of said second conductivity type comprises an epitaxial layer.
6. The structure of claim 1 further comprising at least one first conductivity type wall in said substrate formed in said pixel array region.
7. The structure of claim 6 wherein said first conductivity type wall provides an electrical contact to said pixel array region.
8. The structure of claim 1 wherein said first conductivity type is p-type and said second conductivity type is n-type.
9. The structure of claim 1 wherein said first region of said second conductivity type contiguously surrounds the entire pixel array region.
10. The structure of claim 6 wherein said first conductivity type region contiguously surrounds the entire pixel array region.
11. The structure of claim 1 wherein said first and said second regions of said second conductivity type isolate pixel circuitry formed in said pixel array region from circuitry formed in said peripheral circuit region.
12. The structure of claim 1 wherein said first and said second regions of said second conductivity type reduce pixel dark current by reducing the number of electrons from said peripheral circuit region which can enter said pixel array region.
13. The structure of claim 1 wherein said second region of said second conductivity type is configured to reduce blooming by receiving excess carriers from at least one photo-conversion device.
14. A structure for isolating an imaging area of an image sensor, comprising:
a substrate having at least a first conductivity type region;
a pixel array imaging area isolation structure comprising at least one first region of a second conductivity type in said substrate which defines lateral boundaries around said pixel array imaging area, said pixel array imaging area comprising a plurality of pixels, each pixel being isolated by a surrounding trench isolation region formed in said substrate; and
a second region of said second conductivity type within the substrate and in electrical communication with said first region of said second conductivity type which defines another boundary of said pixel array imaging area.
15. The structure of claim 14 , wherein said second region of said second conductivity type is below the first conductivity type region.
16. The structure of claim 14 , wherein said first region of said second conductivity type is formed around a perimeter of said pixel array region.
17. The structure of claim 14 , wherein said second region of said second conductivity type within the substrate defines a lower boundary of said pixel array imaging area.
18. A structure for isolating imaging areas of an image sensor, comprising:
a substrate having at least a first conductivity type region;
a pixel isolation structure comprising a trench isolation region formed in said substrate, the trench isolation region isolating individual pixel regions by defining a boundary around a perimeter of each pixel region, each pixel region including a single pixel; and
a pixel array isolation structure formed around a perimeter of the pixel isolation structure comprising:
a first region of a second conductivity type formed in the substrate which defines lateral boundaries around the perimeter of the pixel array isolation structure; and
a second region of said second conductivity type formed below the first conductivity type region and in electrical communication with said first region of said second conductivity type, the second region of said second conductivity type defining another boundary of said pixel array isolation structure.