Apparatus for inspecting rubbing inferiority of alignment film of liquid crystal display device

1. An apparatus for forming an alignment film of a liquid crystal display device, comprising:

means for depositing the alignment film on a substrate;

rubbing means for rubbing the alignment film; and

inspecting means for inspecting rubbing inferiority of the alignment film, wherein the inspecting means includes:

a moisture storing unit for storing moisture; and

a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit and spraying the pelletized moisture on the alignment film.

2. The apparatus of claim 1 , wherein the moisture particle generating unit includes a filter having a pore size of tens of μm.

3. The apparatus of claim 1 , wherein the moisture particles have a size corresponding to tens of μm.

4. The apparatus of claim 1 , further comprising a pipe for connecting the moisture storing unit and the moisture particle generating unit.

5. The apparatus of claim 1 , wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate.

6. An apparatus for forming an alignment film of a liquid crystal display device, comprising:

means for depositing the alignment film on a substrate;

rubbing means for rubbing the alignment film; and

inspecting means for inspecting rubbing inferiority of the alignment film, wherein the inspecting means includes:

a moisture storing unit for storing moisture;

a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit and spraying on the alignment film, the moisture particle generating unit including a filter with pores having a size of tens of μm; and

a pipe for connecting the moisture storing unit and the moisture particle generating unit.

7. The apparatus of claim 6 , wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate.

8. An inspection method for detecting rubbing inferiority, which comprises:

providing an apparatus comprising a moisture storing unit for storing moisture, and a moisture particle generating unit for pelletizing moisture;

spraying the pelletized moisture on a substrate; and

visually inspecting the substrate.

9. The method of claim 8 , wherein the moisture particle generating unit includes a filter having a pore size of tens of μm.

10. The method of claim 8 , wherein the moisture particles have a size corresponding to tens of μm.

11. The method of claim 8 , wherein the apparatus further comprises a pipe for connecting the moisture storing unit and the moisture particle generating unit.

12. The method of claim 8 , wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate.

13. An inspection method for detecting rubbing inferiority, which comprises:

providing an apparatus comprising a moisture storing unit for storing moisture, a moisture particle generating unit for pelletizing moisture ejected from the moisture storing unit, the moisture particle generating unit including a filter with pores having a size of tens of μm, and a pipe for connecting the moisture storing unit and the moisture particle generating unit;

spraying the pelletized moisture on a substrate; and

visually inspecting the substrate.

14. The method of claim 13 , wherein the moisture particle generating unit is located at an end portion of a pipe close to a substrate.

15. The method of claim 13 , wherein the moisture particles have a size corresponding to tens of μm.

16. The apparatus of claim 1 , wherein the moisture storing unit contains water.

17. The apparatus of claim 1 , wherein the moisture particle generating unit includes a filter having a pore size of 10–200 μm.

18. The apparatus of claim 1 , wherein the moisture particle generating unit includes a filter made from stainless steel, nylon, polyvinylidene difluoride, polypropylene or polytetrafluorethylene.

19. The apparatus of claim 6 , wherein the moisture storing unit contains water.

20. The apparatus of claim 6 , wherein the filter has a pore size of 10–200 μm.

21. The apparatus of claim 6 , wherein the filter is made from stainless steel, nylon, polyvinylidene difluoride, polypropylene or polytetrafluorethylene.