IP Library Patent Application 10753673
Patent Application
App. No. 10/753,673

Source/drain adjust implant

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Quick Facts
Patent No.
US None
App. No.
10/753,673
Abstract

A two-transistor PMOS memory cell includes a PMOS floating gate transistor sharing a drain/source P+ diffusion region with a PMOS select gate transistor. The shared drain/source diffusion region acts as a drain for the floating gate transistor and as a source to the select gate transistor. The shared drain/source P+ diffusion region is formed in an N− well. Underlying the drain/source P+ diffusion region is a N implant having the same lateral extent of the drain/source P+ diffusion region to provide a lower programming voltage for the floating gate transistor and improved punch-through resistance for the select gate transistor.

Claims (26)

1 . A two-transistor PMOS memory cell, comprising:

a PMOS select transistor having a drain and a source formed as separate P+ diffusion regions in an N− well;

a PMOS floating gate transistor having a drain and a source formed as separate P+ diffusion regions in the N-well, wherein the P+ diffusion region that forms the floating gate transistor's drain is the same P+ diffusion region that forms the select gate transistor's source; and

an N implant underlying the P+ diffusion region that forms the floating gate transistor's drain.

2 . The two-transistor PMOS memory cell of claim 1 , wherein the lateral extent of the N implant is substantially the same as the lateral extent of the P+ diffusion region that forms the PMOS floating gate transistor's drain.

3 . The two-transistor PMOS memory cell of claim 2 , wherein the drain of the PMOS select transistor couples to a bit line of a memory array, and wherein a select gate of the PMOS select transistor couples to a word line of the memory array.

4 . The two-transistor PMOS memory cell of claim 2 , wherein a floating gate of the PMOS floating gate transistor is formed in a first polysilicon layer, and wherein a control gate of the PMOS floating gate transistor is formed in a second polysilicon layer.

5 . The two-transistor PMOS memory cell of claim 2 , wherein the memory cell includes a single polysilicon layer containing a floating gate of the PMOS floating gate transistor, and wherein a control gate of the PMOS floating gate transistor is formed as a P+ diffusion region in the N− well.

6 . The two-transistor PMOS memory cell of claim 2 , wherein the memory cell is configured such that the floating gate transistor may be programmed using band-to-band tunneling.

7 . The two-transistor PMOS memory cell of claim 2 , wherein the memory cell is configured such that the floating gate transistor may be programmed using Fowler Nordheim tunneling.

8 . The two-transistor PMOS memory cell of claim 2 , wherein the P+ diffusion region that forms the floating gate transistor's drain has a thickness of approximately 0.1 to 0.25 microns.

9 . The two-transistor PMOS memory cell of claim 2 , wherein the thickness of the N implant underlying the P+ diffusion region that forms the floating gate transistor's drain is approximately 0.1 to 0.25 microns.

10 . A process for manufacturing a two-transistor PMOS memory cell comprising:

forming an N− well in a P− substrate;

forming a tunnel oxide and a select gate channel oxide on a surface of the N− well;

forming a floating gate over the tunnel oxide and a select gate over the select gate channel oxide;

implanting an P-type dopant into the N− well through the floating gate and the select gate to form a first, a second, and a third P+ diffusion region, the second P+ diffusion region located between a first end of the floating gate and a first end of the select gate, the first P+ diffusion region located at an opposite end of the floating gate, and the third P+ diffusion region located at an opposite end of the select gate;

masking the first and third P+ diffusion regions; and

implanting an n-type dopant into the masked N-well region to form an N implant underlying the second P+ diffusion region.

11 . The process of claim 10 , wherein the process is a single polysilicon layer process, and wherein the act of forming the floating gate and the select gate comprises forming the gates in the single polysilicon layer.

12 . The process of claim 10 , wherein the process is a double polysilicon layer process, wherein the acto of forming the floating gate and the select gate comprises forming the gates in a first polysilicon layer, the method further comprising:

forming a control gate in a second polysilicon layer.

13 . The method of claim 10 , further comprising:

forming a bit line and a word line for programming the two-transistor PMOS memory cell.

14 . The method of claim 10 , further comprising:

manufacturing an array of the two-transistor PMOS memory cells.

Assignments (2)
CHANGE OF NAME Recorded Apr 5, 2006
From: PROGRAMMABLE MICROELECTRONICS CORP.
To: CHINGIS TECHNOLOGY CORPORATION
Reel/Frame 017422/0868 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 7, 2004
From: LIU, I-SHENG; CHANG, SHANG-DE TED
To: PROGRAMMABLE MICROELECTRONICS CORPORATION
Reel/Frame 014881/0677 →