IP Library Granted Patent US 7,399,579
Granted Patent B2
US 7,399,579 · App. 10/763,819 · Granted Jul 15, 2008

Fabrication of metallic microstructures via exposure of photosensitive composition

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Quick Facts
Patent No.
US 7,399,579
App. No.
10/763,819
Granted
Jul 15, 2008
Kind
B2
Abstract

A method of forming microstructures. An article including a metal atom precursor is disproportionally exposed to electromagnetic radiation in an amount and intensity sufficient to convert some of the precursor to elemental metal. Additional conductive material may then be deposited onto the elemental metal to produce a microstructure.

Claims (32)

1. A method of forming a conductive pattern, comprising:

illuminating a photographic film with a desired illumination configuration;

developing the photographic film so that illuminated or non-illuminated portions of the film are adjusted to be in an altered state; and

selectively depositing additional conductive material onto portions of the film in an altered state in amounts greater than amounts of conductive material deposited on portions of the film not in the altered state,

wherein the additional conductive material is deposited via electroless deposition.

2. The method of claim 1 further comprising electroplating a metal on the conductive material deposited via the electroless deposition.

3. The method of claim 2 wherein the metal is nickel.

4. The method of claim 2 ,further comprising freeing the metal from the article.

5. The method of claim 1 wherein the conductive pattern is a circuit.

6. The method of claim 1 , wherein the additional conductive material is a metal.

7. The method of claim 1 , wherein the photographic film comprises a metal atom precursor capable of conversion into elemental metal.

8. The method of claim 7 , wherein the metal atom precursor is a metal salt.

9. The method of claim 8 , wherein the metal salt is a silver halide.

10. The method of claim 1 wherein a planar dimension of a portion of the conductive pattern is less than about 100 μm in width.

11. The method of claim 1 wherein a planar dimension of a portion of the conductive pattern is less than about 50 μm in width.

12. The method of claim 1 wherein a planar dimension of a portion of the conductive pattern is about 30 μm in width.

13. The method of claim 1 , wherein the additional conductive material is deposited proximate a first portion of the film in the altered state while essentially no conductive material is deposited proximate a second portion of the film not in the altered state.

14. A method of forming a discontinuous metallic structure comprising:

illuminating a photographic film with a desired structure configuration;

developing the photographic film so that illuminated or non-illuminated portions of the film are adjusted to be in an altered state; and

selectively depositing additional conductive material onto portions of the film in an altered state in amounts greater than amounts of conductive material deposited on portions of the film not in the altered state,

wherein the additional conductive material is deposited via electroless deposition.

15. The method of claim 14 wherein the additional conductive material is nickel.

16. The method of claim 14 further comprising electroplating a metal on the conductive material deposited via the electroless deposition.

17. The method of claim 16 , further comprising freeing the metal from the article.

18. The method of claim 14 , wherein the photographic film comprises a metal atom precursor capable of conversion into elemental metal.

19. The method of claim 18 , wherein the metal atom precursor is a metal salt.

20. The method of claim 19 , wherein the metal salt is a silver halide.

21. The method of claim 14 wherein a planar dimension of a portion of the discontinous metallic structure is less than about 100 μm in width.

22. The method of claim 14 wherein a planar dimension of a portion of the discontinous metallic structure is less than about 50 μm in width.

23. The method of claim 14 wherein a planar dimension of a portion of the discontinous metallic structure is about 30 μm in width.

24. The method of claim 14 , wherein the additional conductive material is deposited proximate a first portion of the film in the altered state while essentially no conductive material is deposited proximate a second portion of the film not in the altered state.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 12, 2008
From: DENG, TAO; ARIAS, FRANCISCO; ISMAGILOV, RUSTEM F.; KENIS, PAUL J.A.; WHITESIDES, GEORGE M.
To: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
Reel/Frame 020933/0725 →