IP Library › Granted Patent US 6,985,650

Granted Patent B2

US 6,985,650 · App. 10/772,564 · Granted Jan 10, 2006

Thermal actuator and an optical waveguide switch including the same

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Quick Facts

Patent No.: US 6,985,650
App. No.: 10/772,564
Granted: Jan 10, 2006
Kind: B2

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Abstract

A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

Claims (212)

1. A thermal actuator ( 500 ) comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a beam ( 510 ) extending between the first support and the second support, the beam having a first side ( 511 ), a second side ( 512 ), a beam length ( 518 ) and a beam mid-point ( 519 ), the beam being substantially straight along the first side ( 511 );

the beam comprised of a plurality of beam segments ( 520 , 522 , 524 ), each beam segment of the plurality of beam segments having a beam segment width ( 525 , 526 , 527 ) orthogonal to the beam length, the beam thus forming a corresponding plurality of beam segment widths;

wherein the plurality of beam segment widths corresponding to the beam vary along the beam length based on a predetermined pattern;

so that a heating of the beam causes a beam buckling and the beam mid-point to translate in a predetermined direction ( 548 ) generally normal to and outward from the second side;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment widths corresponding to successive beam segments do not decrease and at least sometimes increase, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease.

2. The thermal actuator of claim 1 , the heating of the beam provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

3. The thermal actuator of claim 1 , the heating of the beam provided by a beam heater current supplied by an included beam input and beam output.

4. The thermal actuator of claim 1 , wherein the beam is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

5. The thermal actuator of claim 1 , wherein the beam is fabricated in a device layer of a silicon-an-insulator wafer.

6. The thermal actuator of claim 1 , wherein the beam comprises exactly three (3) beam segments.

7. The thermal actuator of claim 1 , wherein the beam comprises a plurality (n) of beam segments, where n does not equal 3.

8. The thermal actuator of claim 1 , wherein the beam comprises exclusively beam segments having substantially parallel sides.

9. The thermal actuator of claim 1 , wherein the beam comprises exactly two (2) beam segments that are substantially equal with respect to their corresponding beam segment lengths and beam segment widths.

10. A thermal actuator ( 600 ) comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a plurality of beams ( 610 a , 610 b , 610 c ) extending in parallel between the first support and the second support, thus forming a beam array ( 613 );

each beam of the beam array having a first side ( 611 a , 611 b , 611 c ), a second side ( 612 a , 612 b , 612 c ), a beam length ( 618 ) and a beam mid-point ( 619 ), each beam being substantially straight along its first side ( 611 a , 611 b , 611 c );

each beam of the beam array comprised of a plurality of beam segments ( 620 , 622 , 624 ), each beam segment of the plurality of beam segments having a beam segment width ( 625 a , 626 a , 627 a , 625 b , 626 b , 627 b , 625 c , 627 c , 627 c ) orthogonal to the beam length, each beam thus forming a corresponding plurality of beam segment widths;

wherein the plurality of beam segment widths corresponding to each beam vary along the beam length based on a predetermined pattern;

an included coupling beam ( 614 ) extending orthogonally across the beam array to couple each beam of the beam array substantially at the corresponding beam mid-point;

so that a heating of the beam array causes a beam array buckling and the coupling beam to translate in a predetermined direction ( 648 ) generally normal to and outward from the second sides of the array beams;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point beam segment widths corresponding to successive beam segments do not decrease and at least sometimes increase, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease.

11. The thermal actuator of claim 10 , the heating of the beam array provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

12. The thermal actuator of claim 10 , wherein each beam of the beam array is heated by a beam heater current supplied by an included beam input and beam output, thus forming the heating of the beam array.

13. The thermal actuator of claim 10 , wherein each beam of the beam array is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

14. The thermal actuator of claim 10 , wherein each beam of the beam array is fabricated in a device layer of a silicon-on-insulator wafer.

15. The thermal actuator of claim 10 , wherein each beam of the beam array comprises exactly three (3) beam segments.

16. The thermal actuator of claim 10 , wherein each beam of the beam array comprises a plurality (n) of beam segments, where n does not equal 3.

17. The thermal actuator of claim 10 , wherein the beam array comprises exactly three (3) beams.

18. The thermal actuator of claim 10 , wherein the beam array comprises a plurality (n) of beams, where n does not equal 3.

19. The thermal actuator ( 600 ) of claim 10 , wherein the coupling beam ( 614 ) intersects only a portion of one beam segment ( 622 ) in each beam of the plurality of beams ( 610 a , 610 b , 610 c ) comprising the beam array ( 613 ).

20. The thermal actuator ( 600 ) of claim 19 , wherein the beam array ( 613 ) comprises exactly three (3) beams ( 610 a , 610 b , 610 c ) and wherein each beam of said three (3) beams comprises exactly three (3) beam segments ( 620 , 622 , 624 ).

21. A thermal actuator ( 700 ) comprising:

a substrate having a surface; a first support and a second support disposed on the surface and extending orthogonally therefrom;

a beam ( 710 ) extending between the first support and the second support, the beam having a first side ( 711 ), a second side ( 712 ), a beam length ( 718 ) and a beam mid-point ( 719 ), the beam being substantially straight along the second side ( 712 );

the beam comprised of a plurality of beam segments, each beam segment of the plurality of beam segments having a beam segment width ( 725 , 726 , 727 ) orthogonal to the beam length, the beam thus forming a corresponding plurality of beam segment widths;

wherein the plurality of beam segment widths corresponding to the beam vary along the beam length based on a predetermined pattern;

so that a heating of the beam causes a beam buckling and the beam mid-point to translate in a predetermined direction ( 748 ) generally normal to and outward from the second side;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not decrease and at least sometimes increase.

22. The thermal actuator of claim 21 , the heating of the beam provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

23. The thermal actuator of claim 21 , the heating of the beam provided by a beam heater current supplied by an included beam input and beam output.

24. The thermal actuator of claim 21 , wherein the beam is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

25. The thermal actuator of claim 21 , wherein the beam is fabricated in a device layer of a silicon-on-insulator wafer.

26. The thermal actuator of claim 21 , wherein the beam comprises exactly three (3) beam segments.

27. The thermal actuator of claim 21 , wherein the beam comprises a plurality (n) of beam segments, where n does not equal 3.

28. The thermal actuator of claim 21 , wherein the beam comprises exclusively beam segments having substantially parallel sides.

29. The thermal actuator of claim 21 , wherein the beam comprises exactly two (2) beam segments that are substantially equal with respect to their corresponding beam segment lengths and beam segment widths.

30. A thermal actuator ( 800 ) comprising:

a substrate having a surface; a first support and a second support disposed on the surface and extending orthogonally therefrom;

a plurality of beams ( 810 a , ( 810 b , 810 c ) extending in parallel between the first support and the second support, thus forming a beam array ( 813 );

each beam of the beam array having a first side ( 811 a , 811 b , 811 c ), a second side ( 812 a , 812 b , 812 c ), a beam length ( 818 ) and a beam mid-point ( 819 ), each beam being substantially straight along its second side ( 812 a , 812 b , 812 c );

each beam of the beam array comprised of a plurality of beam segments ( 820 , 822 , 824 ), each beam segment of the plurality of beam segments having a beam segment width ( 825 a , 826 a , 827 a , 825 b , 826 b , 827 b , 825 c , 826 c , 827 c ) orthogonal to the beam length, each beam thus forming a corresponding plurality of beam segment widths;

wherein the plurality of beam segment widths corresponding to each beam vary along the beam length based on a predetermined pattern;

an included coupling beam ( 814 ) extending orthogonally across the beam array to couple each beam of the beam array substantially at the corresponding beam mid-point;

so that a heating of the beam array causes a beam array buckling and the coupling beam to translate in a predetermined direction ( 848 ) generally normal to and outward from the second sides of the array beams;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not decrease and at least sometimes increase.

31. The thermal actuator of claim 30 , the heating of the beam array provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

32. The thermal actuator of claim 30 , wherein each beam of the beam array is heated by a beam heater current supplied by an included beam input and beam output, thus forming the heating of the beam array.

33. The thermal actuator of claim 30 , wherein each beam of the beam array is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

34. The thermal actuator of claim 30 , wherein each beam of the beam array is fabricated in a device layer of a silicon-on-insulator wafer.

35. The thermal actuator of claim 30 , wherein each beam of the beam array comprises exactly three (3) beam segments.

36. The thermal actuator of claim 30 , wherein each beam of the beam array comprises a plurality (n) of beam segments, where n does not equal 3.

37. The thermal actuator of claim 30 , wherein the beam array comprises exactly three (3) beams.

38. The thermal actuator of claim 30 , wherein the beam array 813 comprises a plurality (n) of beams, where n does not equal 3.

39. The thermal actuator ( 800 ) of claim 30 , wherein the coupling beam ( 814 ) intersects only a portion of one beam segment ( 822 ) in each beam of the plurality of beams ( 810 a , 810 b , 810 c ) comprising the beam array ( 813 ).

40. The thermal actuator ( 800 ) of claim 39 , wherein the beam array ( 813 ) comprises exactly three (3) beams ( 810 a , 810 b , 810 c ) and wherein each beam of said three (3) beams comprises exactly three (3) beam segments ( 820 , 822 , 824 ).

41. A thermal actuator ( 900 ) comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a beam ( 910 ) extending between the first support and the second support, the beam having a first side ( 911 ), a second side ( 912 ), a beam length ( 918 ) and a beam mid-point ( 919 ), the beam being substantially straight along the first side ( 911 );

the beam comprised of a plurality of beam segments ( 920 , 921 , 922 , 923 , 924 ), each beam segment of the plurality of beam segments having a beam segment average width ( 925 , 931 , 926 , 933 , 927 ) orthogonal to the beam length, the beam thus forming a corresponding plurality of beam segment average widths;

wherein the plurality of beam segment average widths corresponding to the beam vary along the beam length based on a predetermined pattern;

so that a heating of the beam causes a beam buckling and the beam mid-point to translate in a predetermined direction ( 948 ) generally normal to and outward from the second side;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment average widths corresponding to successive beam segments do not decrease and at least sometimes increase, and along the beam length from the beam mid-point to the second support, beam segment average widths corresponding to successive beam segments do not increase and at least sometimes decrease.

42. The thermal actuator of claim 41 , the heating of the beam provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

43. The thermal actuator of claim 41 , the heating of the beam provided by a beam heater current supplied by an included beam input and beam output.

44. The thermal actuator of claim 41 , wherein the beam is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

45. The thermal actuator of claim 41 , wherein the beam is fabricated in a device layer of a silicon-on-insulator wafer.

46. The thermal actuator of claim 41 , wherein the beam comprises exactly five (5) beam segments.

47. The thermal actuator of claim 41 , wherein the beam comprises a plurality (n) of beam segments, where n does not equal 5.

48. The thermal actuator of claim 41 , wherein the beam comprises exactly three (3) beam segments having substantially parallel sides.

49. The thermal actuator of claim 41 , wherein the beam comprises exactly two (2) beam segments that are substantially equal with respect to their corresponding beam segment lengths and beam segment widths.

50. A thermal actuator ( 1000 ) comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a plurality of beams ( 1010 a , 1010 b , 1010 c ), extending in parallel between the first support and the second support, thus forming a beam array ( 1009 );

each beam of the beam array having a first side ( 1011 a , 1011 b , 1011 c ), a second side ( 1012 a , 1012 b , 1012 c ), a beam length ( 1018 ) and a beam mid-point ( 1019 ), each beam being substantially straight along its first side ( 1011 a , 1011 b , 1011 c );

each beam of the beam array comprised of a plurality of beam segments ( 1020 , 1021 , 1022 , 1023 , 1024 ), each beam segment of the plurality of beam segments having a beam segment average width ( 1025 a , 1031 a , 1026 a , 1033 a , 1027 a , 1025 b , 1031 b , 1026 b , 1033 b , 1027 b , 1025 c , 1031 c , 1026 c , 1033 c , 1027 c ) orthogonal to the beam length, each beam thus forming a corresponding plurality of beam segment average widths;

wherein the plurality of beam segment average widths corresponding to each beam vary along the beam length based on a predetermined pattern;

an included coupling beam ( 1005 ) extending orthogonally across the beam array to couple each beam of the beam array substantially at the corresponding beam mid-point;

so that a heating of the beam array causes a beam array buckling and the coupling beam to translate in a predetermined direction ( 1048 ) generally normal to and outward from the second sides of the array beams;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment average widths corresponding to successive beam segments do not decrease and at least sometimes increase, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease.

51. The thermal actuator of claim 50 , the heating of the beam array provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

52. The thermal actuator of claim 50 , wherein each beam of the beam array is heated by a beam heater current by an included beam input and beam output, thus forming the heating of the beam array.

53. The thermal actuator of claim 50 , wherein each beam of the beam array is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

54. The thermal actuator of claim 50 , wherein each beam of the beam array is fabricated in a device layer of a silicon-on-insulator wafer.

55. The thermal actuator of claim 50 , wherein each beam of the beam array comprises exactly five (5) beam segments.

56. The thermal actuator of claim 50 , wherein each beam of the beam array comprises a plurality (n) of beam segments, where n does not equal 5.

57. The thermal actuator of claim 50 , wherein the beam array comprises exactly three (3) beams.

58. The thermal actuator of claim 50 , wherein the beam array comprises a plurality (n) of beams, where n does not equal 3.

59. The thermal actuator ( 1000 ) of claim 50 , wherein the coupling beam ( 1005 ) intersects only a portion of one beam segment ( 1022 ) in each beam of the plurality of beams ( 1010 a , 1010 b , 1010 c ) comprising the beam array ( 1009 ).

60. The thermal actuator ( 1000 ) of claim 59 , wherein the beam array ( 1009 ) comprises exactly three (3) beams ( 1010 a , 1010 b , 1010 c ) and wherein each beam of said three (3) beams comprises exactly five (5) beam segments ( 1020 , 1021 , 1022 , 1023 , 1024 ).

61. An optical waveguide switch ( 100 d ) comprising a thermal actuator ( 500 ), the thermal actuator comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

wherein the plurality of beam segment widths corresponding to the beam vary along the beam length based on a predetermined pattern;

so that a heating of the beam causes a beam buckling and the beam mid-point to translate in a predetermined direction ( 548 ) generally normal to and outward from the second side;

62. The optical waveguide switch of claim 61 , the heating of the beam provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

63. The optical waveguide switch of claim 61 , the heating of the beam provided by a beam heater current supplied by an included beam input and beam output.

64. The optical waveguide switch of claim 61 , wherein the beam is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

65. The optical waveguide switch of claim 61 , wherein the beam is fabricated in a device layer of a silicon-on-insulator wafer.

66. The optical waveguide switch of claim 61 , wherein the beam comprises a plurality (n) of beam segments, where n does not equal 3.

67. The optical waveguide switch of claim 61 , wherein the beam comprises exactly three (3) beam segments.

68. The optical waveguide switch of claim 61 , wherein the beam comprises exclusively beam segments having substantially parallel sides.

69. The optical waveguide switch of claim 61 , wherein the beam comprises exactly two (2) beam segments that are substantially equal with respect to their corresponding beam segment lengths and beam segment widths.

70. An optical waveguide switch ( 100 e ) comprising a thermal actuator ( 600 ), the thermal actuator comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a plurality of beams ( 610 a , 610 b , 610 c ) extending in parallel between the first support and the second support, thus forming a beam array ( 613 );

each beam of the beam array having a first side ( 611 a, 611 b , 611 c ), a second side ( 612 a , 612 b , 612 c ), a beam length ( 618 ) and a beam mid-point ( 619 ), each beam being substantially straight along its first side ( 611 a , 611 b , 611 c );

each beam of the beam array comprised of a plurality of beam segments ( 620 , 622 , 624 ), each beam segment of the plurality of beam segments having a beam segment width ( 625 a , 626 a , 627 a , 625 b , 626 b , 627 b , 625 c , 626 c , 627 c ) orthogonal to the beam length, each beam thus forming a corresponding plurality of beam segment widths;

wherein the plurality of beam segment widths corresponding to each beam vary along the beam length based on a predetermined pattern;

an included coupling beam ( 614 ) extending orthogonally across the beam array to couple each beam of the beam array substantially at the corresponding beam mid-point;

71. The optical waveguide switch of claim 70 , the heating of the beam array provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

72. The optical waveguide switch of claim 70 , wherein each beam of the beam array is heated by a beam heater current supplied by an included beam input and beam output, thus forming the heating of the beam array.

73. The optical waveguide switch of claim 70 , wherein each beam of the beam array is fabricated of a low-conductivity maternal of either monocrystalline silicon or polycrystalline silicon.

74. The optical waveguide switch of claim 70 , wherein each beam of the beam array is fabricated in a device layer of a silicon-on-insulator wafer.

75. The optical waveguide switch of claim 70 , wherein each beam of the beam array comprises a plurality (n) of beam segments, where n does not equal 3.

76. The optical waveguide switch of claim 70 , wherein each beam of the beam array comprises exactly three (3) beam segments.

77. The optical waveguide switch of claim 70 , wherein the beam array comprises a plurality (n) of beams, where n does not equal 3.

78. The optical waveguide switch claim 70 , wherein the beam array comprises exactly three (3) beams.

79. The optical waveguide switch ( 100 e ) of claim 70 , wherein the coupling beam ( 614 ) intersects only a portion of one beam segment ( 622 ) in each beam of the plurality of beams ( 610 a , 610 b , 610 c ) comprising the beam array ( 613 ).

80. The optical waveguide switch ( 100 e ) of claim 79 , wherein the beam array ( 613 ) comprises exactly three (3) beams ( 610 a , 610 b , 610 c ) and wherein each beam of said three (3) beams comprises exactly three (3) beam segments ( 620 , 622 , 624 ).

81. An optical waveguide switch ( 100 f ) comprising a thermal actuator ( 700 ), the thermal actuator comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

wherein the plurality of beam segment widths corresponding to the beam vary along the beam length based on a predetermined pattern;

so that a heating of the beam causes a beam buckling and the beam mid-point to translate in a predetermined direction ( 748 ) generally normal to and outward from the second sides;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not decrease and at least sometimes increase.

82. The optical waveguide switch of claim 81 , the heating of the beam provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

83. The optical waveguide switch of claim 81 , the heating of the beam provided by a beam heater current supplied by an included beam input and beam output.

84. The optical waveguide switch of claim 81 , wherein the beam is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

85. The optical waveguide switch of claim 81 , wherein the beam is fabricated in a device layer of a silicon-on-insulator wafer.

86. The optical waveguide switch of claim 81 , wherein the beam comprises a plurality (n) of beam segments, where n does not equal 3.

87. The optical waveguide switch of claim 81 , wherein the beam comprises exactly three (3) beam segments.

88. The optical waveguide switch of claim 81 , wherein the beam comprises exclusively beam segments having substantially parallel sides.

89. The thermal actuator of claim 81 , wherein the beam comprises exactly two (2) beam segments that are substantially equal with respect to their corresponding beam segment lengths and beam segment widths.

90. An optical waveguide switch ( 100 g ) comprising a thermal actuator ( 800 ), the thermal actuator comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a plurality of beams ( 810 a , 810 b , 810 c ) extending in parallel between the first support and the second support, thus forming a beam array ( 813 ); each beam of the beam array having a first side ( 811 a , 811 b , 811 c ), a second side ( 812 a , 812 b , 812 c ), a beam length ( 818 ) and a beam mid-point ( 819 ), each beam being substantially straight along its second side ( 812 a , 812 b , 812 c ); each beam of the beam array comprised of a plurality of beam segments ( 820 , 822 , 824 ), each beam segment of the plurality of beam segments having a beam segment width ( 825 a , 826 a , 827 a , 825 b , 826 b , 827 b , 825 c , 826 c , 827 c ) orthogonal to the beam length, each beam thus forming a corresponding plurality of beam segment widths;

wherein the plurality of beam segment widths corresponding to each beam vary along the beam length based on a predetermined pattern;

an included coupling beam ( 814 ) extending orthogonally across the beam array to couple each beam of the beam array substantially at the corresponding beam mid-point;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease, and along the beam length from the beam mid-point to the second support beam segment widths corresponding to successive beam segments do not decrease and at least sometimes increase.

91. The optical waveguide switch of claim 90 , the heating of the beam array provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

92. The optical waveguide switch of claim 90 , wherein each beam of the beam array is heated by a beam heater current supplied by an included beam input and beam output, thus forming the heating of the beam array.

93. The optical waveguide switch of claim 90 , wherein each beam of the beam array is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

94. The optical waveguide switch of claim 90 , wherein each beam of the beam array is fabricated in a device layer of a silicon-on-insulator wafer.

95. The optical waveguide switch of claim 90 , wherein each beam of the beam array 813 comprises a plurality (n) of beam segments, where n does not equal 3.

96. The optical waveguide switch of claim 90 , wherein each beam of the beam array comprises exactly three (3) beam segments.

97. The optical waveguide switch of claim 90 , wherein the beam array comprises a plurality (n) of beams, where n does not equal 3.

98. The optical waveguide switch of claim 90 , wherein the beam array comprises exactly three (3) beams.

99. The optical waveguide switch ( 100 g ) of claim 90 , wherein the coupling beam ( 814 ) intersects only a portion of one beam segment ( 822 ) in each beam of the plurality of beams ( 810 a , 810 b , 810 c ) comprising the beam array ( 813 ).

100. The optical waveguide switch ( 100 g ) of claim 99 , wherein the beam array ( 813 ) comprises exactly three (3) beams ( 810 a , 810 b , 810 c ) and wherein each beam of said three (3) beams comprises exactly three (3) beam segments ( 820 , 822 , 824 ).

101. An optical waveguide switch ( 100 h ) comprising a thermal actuator ( 900 ), the thermal actuator comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

wherein the plurality of beam segment average widths corresponding to the beam vary along the beam length based on a predetermined pattern;

so that a heating of the beam causes a beam buckling and the beam mid-point to translate in a predetermined direction ( 948 ) generally normal to and outward from the second side;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment average widths corresponding to successive beam segments do not decrease and at least sometimes increase and along the beam length from the beam mid-point to the second support, beam segment average widths corresponding to successive beam segments do not increase and at least sometimes decrease.

102. The optical waveguide switch of claim 101 , the heating of the beam provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

103. The optical waveguide switch of claim 101 , the heating of the beam provided by a beam heater current supplied by an included beam input and beam output.

104. The optical waveguide switch of claim 101 , wherein the beam is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

105. The optical waveguide switch of claim 101 , wherein the beam is fabricated in a device layer of a silicon-on-insulator wafer.

106. The optical waveguide switch of claim 101 , wherein the beam comprises a plurality (n) of beam segments, where n does not equal 5.

107. The optical waveguide switch of claim 101 , wherein the beam comprises exactly five (5) beam segments.

108. The optical waveguide switch of claim 101 , wherein the beam comprises exactly three (3) beam segments having substantially parallel sides.

109. The optical waveguide switch of claim 101 , wherein the beam comprises exactly two (2) beam segments that are substantially equal with respect to their corresponding beam segment lengths and beam segment widths.

110. An optical waveguide switch ( 100 i ) comprising a thermal actuator ( 1000 ), the thermal actuator comprising:

a substrate having a surface;

a first support and a second support disposed on the surface and extending orthogonally therefrom;

a plurality of beams ( 1010 a , 1010 b , 1010 c ) extending in parallel between the first support and the second support, thus forming a beam array ( 1009 );

each beam of the beam array comprised of a plurality of beam segments ( 1020 , 1021 , 1022 , 1023 , 1024 ), each beam segment of the plurality of beam segments having a beam segment average width ( 1025 a , 1031 a , 1026 a , 1033 a , 1025 b , 1031 b , 1026 b , 1033 b , 1027 b , 1025 c , 1031 c , 1026 c , 1033 c , 1027 c ) orthogonal to the beam length, each beam thus forming a corresponding plurality of beam segment average widths;

wherein the plurality of beam segment average widths corresponding to each beam vary along the beam length based on a predetermined pattern;

an included coupling beam ( 1005 ) extending orthogonally across the beam arry to couple each beam of the beam array substantially at the corresponding beam mid-point;

so that a heating of the beam array causes a beam array buckling and the coupling beam to translate in a predetermined direction ( 1048 ) generally normal to an outward from the second sides of the array beams;

wherein the predetermined pattern is characterized in that, along the beam length from the first support to the beam mid-point, beam segment average widths corresponding to successive beam segments do not decrease and at least sometimes increase, and along the beam length from the beam mid-point to the second support, beam segment widths corresponding to successive beam segments do not increase and at least sometimes decrease.

111. The optical waveguide switch of claim 110 , the heating of the beam array provided by an included heater layer disposed on the surface, the heater layer coupled to a heater layer input and a heater layer output.

112. The optical waveguide switch of claim 110 , wherein each beam of the beam array is heated by a beam heater current supplied by an included beam input and beam output, thus forming the heating of the beam array.

113. The optical waveguide switch of claim 110 , wherein each beam of the beam array is fabricated of a low-conductivity material of either monocrystalline silicon or polycrystalline silicon.

114. The optical waveguide switch of claim 110 , wherein each beam of the beam array is fabricated in a device layer of a silicon-on-insulator wafer.

115. The optical waveguide switch of claim 110 , wherein each beam of the beam array comprises a plurality (n) of beam segments, where n does not equal 5.

116. The optical waveguide switch of claim 110 , wherein each beam of the beam array comprises exactly five (5) beam segments.

117. The optical waveguide switch of claim 110 , wherein the beam array comprises a plurality (n) of beams, where n does not equal 3.

118. The optical waveguide switch of claim 110 , wherein the beam array comprises exactly three (3) beams.

119. The optical waveguide switch ( 100 i ) of claim 110 , wherein the coupling beam ( 1005 ) intersects only a portion of one beam segment ( 1022 ) in each beam of the plurality of beams ( 1010 a , 1010 b , 1010 c ) comprising the beam array ( 1009 ).

120. The optical waveguide switch ( 100 i ) of claim 119 , wherein the beam array ( 1009 ) comprises exactly three (3) beams ( 1010 a , 1010 b , 1010 c ) and wherein each beam of said three (3) beams comprises exactly five (5) beam segments ( 1020 , 1021 , 1022 , 1023 , 1024 ).

Assignments (1)

RELEASE OF SECURITY INTEREST Recorded Aug 31, 2022

From: JPMORGAN CHASE BANK, N.A. AS SUCCESSOR-IN-INTEREST ADMINISTRATIVE AGENT AND COLLATERAL AGENT TO BANK ONE, N.A.

To: XEROX CORPORATION

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