Semiconductor device having an STI structure and a dummy pattern with a rectangular shape
View Patent ↗An inventive method for fabricating a semiconductor device includes the steps of: a) forming trenches in an actual element region and a dummy pattern region of a substrate by using a mask; b) depositing an insulator over the substrate, thereby forming an insulating film that fills at least the trenches; and c) removing a portion of the insulating film protruded from the trenches, thereby forming, in the trenches within the actual element region, a first embedded insulating film for isolation, and forming a second embedded insulating film in the trenches within the dummy pattern region. The dummy pattern region has dummy patterns in which no trenches are formed, and the widthwise size of each dummy pattern is four times or less of the depth of a portion of each trench provided in the substrate.
1. A semiconductor device comprising:
a substrate which has an actual element region including active areas and has a dummy pattern region including dummy patterns, and in which trenches are formed in the actual element region and the dummy pattern region;
semiconductor elements provided over the active areas of the substrate;
a first embedded insulating film, provided in the trenches within the actual element region, for isolating the semiconductor elements adjacent to each other; and
a second embedded insulating film, provided in the trenches within the dummy pattern region, for surrounding the dummy patterns,
wherein the widthwise size of each dummy pattern is four times the depth of each trench or less,
wherein each dummy pattern has a rectangular shape in plan view,
wherein a shorter side of the rectangular shape corresponds to the widthwise size of the dummy pattern, and
wherein a longer side of the rectangular shape is greater than the widthwise size of the dummy pattern by three times or more.
2. The semiconductor device of claim 1 ,
wherein the widthwise size of each dummy pattern is greater than 0 μm, and is equal to or less than 1.0 μm.
3. The semiconductor device of claim 1 ,
wherein given that regions of the substrate except the active areas are isolation regions, the proportion of the dummy patterns to the isolation regions in plan view is 15% or more and 80% or less.