Method of fabricating array substrate for use in an in-plane switching mode liquid crystal display device
View Patent ↗A method of fabricating an array substrate (as well as an array substrate itself) for use in an IPS-LCD device prevents a short-circuit between a data line and a storage capacitor. When fabricating the array substrate for use in the IPS-LCD device, the residues of a third metallic material, which remains in step portions of the double-layered common line, cause a short-circuit between a data line and a storage capacitor. In order to prevent the short-circuit, a plurality of protrusions extending from a first layer of the double-layered common line are formed at both sides of the storage capacitor. The plural protrusions have quadrilateral-shaped holes in their central portions. By forming an etching hole at each corner of the protrusion and eliminating the residues using the etching hole, the short-circuit between the storage capacitor and the data line is obviated. Accordingly, the IPS-LCD device having a high resolution is achieved.
1. A method of fabricating an array substrate for use in an IPS-LCD device, comprising:
depositing a first metallic material on a substrate;
patterning the first metallic material to form a first gate electrode, a first gate line, a first common line, and a plurality of protrusions, wherein each protrusion has a hole in a central portion thereof and extends from the first common line, and wherein the first gate electrode extends from the first gate line;
depositing a second metallic material on the substrate and on the patterned first metallic material;
patterning the second metallic material to form a second gate electrode, second gate line, second common line, a common-connecting line, and a plurality of common electrodes, wherein the first and second gate electrodes overlap each other to form a double-layered gate electrode, wherein the first and second common lines overlap each other to form a double-layered common line, and wherein the first and second gate lines overlap each other to form a double-layered gate line;
forming a gate insulation layer on the substrate and on the patterned second metallic material;
forming an active layer and an ohmic contact layer sequentially on the gate insulation layer and over the double-layered gate electrodes;
depositing a third metallic material on the ohmic contact layer and on the gate insulation layer;
forming a data line, a source electrode, and a drain electrode by patterning the third metallic material, wherein the source and drain electrodes are over the double-layered gate electrodes, and wherein the data line is perpendicular to both the double-layered gate lines and double-layered common lines;
forming a passivation layer on the patterned third metallic layer and on the gate insulation layer, wherein the passivation layer has a drain contact hole to the drain electrode, and an etching hole over each protrusion;
depositing a transparent conductive material on the passivation layer having the drain contact hole and the etching hole; and
forming a plurality of pixel electrodes and first and second connecting lines.
2. A method of fabricating an array substrate according to claim 1 , further comprising: forming a channel region by patterning a portion of the ohmic contact layer between the source and drain electrodes.
3. A method of fabricating an array substrate according to claim 1 , wherein each pair of double-layered gate lines and data lines defines a pixel area.
4. A method of fabricating an array substrate according to claim 1 , wherein the double-layered common line is parallel with and spaced apart from the double-layered gate line.
5. A method of fabricating an array substrate according to claim 1 , wherein a plurality of the common electrodes are parallel with the data line.
6. A method of fabricating an array substrate according to claim 1 , wherein the common-connecting line is perpendicular to and connects the plural common electrodes with each other.
7. A method of fabricating an array substrate according to claim 1 , wherein a plurality of the pixel electrodes are spaced apart from and parallel with the said common electrodes.
8. A method of fabricating an array substrate according to claim 1 , wherein each pixel electrode is located between the pair of common electrodes and corresponds to each common electrode.
9. A method of fabricating an array substrate according to claim 1 , wherein the first and second pixel-connecting lines are parallel with the double-layered common line and respectively connect the pixel electrodes to each other at respective first and second ends of the pixel electrodes.
10. A method of fabricating an array substrate according to claim 1 , wherein the second pixel-connecting line overlaps a portion of the double-layered common line to form a storage capacitor.
11. The array substrate according to claim 10 , wherein the protrusions extended from the first common line are located on both sides of the storage capacitor.
12. A method of fabricating an array substrate according to claim 1 , wherein the double-layered gate electrode, the active layer, the ohmic contact layer, the source electrode and the drain electrode comprise a thin film transistor that is located near the crossing of a double-layer gate line and data line.
13. A method of fabricating an array substrate according to claim 1 , wherein the third metallic material is selected from a group consisting of chromium (Cr), aluminum (Al), aluminum alloy (Al alloy), molybdenum (Mo), tantalum (Ta), tungsten (W), and antimony (Sb).
14. A method of fabricating an array substrate according to claim 1 , wherein the double-layered common line is made of the same material as the double-layered gate lines and formed in the same layer as the double-layered gate lines.
15. A method of fabricating an array substrate according to claim 1 , wherein each protrusion has a quadrilateral shape.
16. A method of fabricating an array substrate according to claim 1 , wherein each protrusion has a quadrilateral-shaped hole in a central portion thereof.
17. A method of fabricating an array substrate according to claim 1 , wherein the first metallic material includes aluminium (Al).
18. A method of fabricating an array substrate according to claim 1 , wherein the second metallic material is selected from a group consisting of molybdenum (Mo), chrome (Cr) and tungsten (W).