Magnetic pole tip for perpendicular magnetic recording
View Patent ↗A method for forming a magnetic structure, such as a pole tip, includes forming a pole tip layer of magnetic material. A layer of polyimide precursor material is added above the pole tip layer and cured. A silicon-containing resist layer is added above the layer of polyimide precursor material and patterned. The resist layer is exposed to oxygen plasma for converting the resist into a glass-like material. Exposed portions of the cured polyimide precursor material are removed for exposing portions of the pole tip layer. The exposed portions of the pole tip layer are removed for forming a pole tip. Chemical mechanical polishing (CMP) can then be performed to remove any unwanted material remaining above the pole tip.
1. A perpendicular pole tip structure, comprising:
a pole tip layer of magnetic material having a top surface, a bottom surface, and sides extending between the top and bottom surface;
layers of non-magnetic materials surrounding the layers of magnetic material towards the sides of the pole tip layer; and
CMP resistant layers above the non-magnetic material, portions of the CMP resistant layers lying along a plane substantially parallel to the top surface of the pole tip layer.
2. A perpendicular pole tip structure as recited in claim 1 , wherein each of the interface CMP resistant layers includes a layer of diamond like carbon (DLC).
3. A perpendicular pole tip stnxcture as recited in claim 1 , further comprising a layer of chemical mechanical polishing resistant material above the top surface of the pole tip layer.
4. A pole tip structure as in claim 3 wherein the CMP resistant material above the top surface of the pole tip layer comprises diamond like carbon (DLC).
5. A perpendicular pole tip structure as in claim 1 wherein the non-magnetic layers comprise alumina.
6. A magnetic storage system, comprising:
magnetic media;
at least one perpendicular head for reading from and writing to the magnetic media, the bead comprising:
a pole tip layer of magnetic material having a top surface, a bottom surface, and sides extending between the top and bottom surface;
layers of non-magnetic materials surrounding the layer of magnetic material towards the sides of the pole tip layer; and
CMP resistant layers above the non-magnetic material, portions of the CMP resistant layers lying along a plane substantially parallel to the top surface of the pole tip layer;
a slider for supporting the head; and
a control unit coupled to the head for controlling operation of the head.
7. A magnetic storage system as recited in claim 6 , wherein each of the CMP resistant layers includes a layer of diamond like carbon (DLC).
8. A magnetic storage system as recited in claim 6 , further comprising a layer of chemical mechanical polishing resistant material above the top surface of the pole tip layer.
9. A magnetic storage system as in claim 8 wherein the CMP resistant material above the top suribee of the pole tip layer comprises diamond like carbon (DLC).
10. A magnetic storage system as in claim 6 wherein the non-magnetic layers comprise alumina.