Vertically separated acoustic filters and resonators
View Patent ↗An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
1. An apparatus comprising:
a first acoustic resonator on a substrate;
a second acoustic resonator above said first acoustic resonator, said second acoustic resonator vertically separated from said first acoustic resonator such that little or no acoustic energy is coupled between said first acoustic resonator and said second acoustic resonator;
wherein said first acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
wherein said second acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
a standoff between the top electrode of said first acoustic resonator and the bottom electrode of said second acoustic resonator; and
wherein the top electrode of said first acoustic resonator and the bottom electrode of said second acoustic resonator are electrically connected by the standoff.
2. An apparatus comprising:
a first acoustic resonator on a substrate;
a second acoustic resonator above said first acoustic resonator, said second acoustic resonator vertically separated from said first acoustic resonator such that little or no acoustic energy is coupled between said first acoustic resonator and said second acoustic resonator;
wherein said first acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
wherein said second acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
a standoff between the top electrode of said first acoustic resonator and the bottom electrode of said second acoustic resonator; and
wherein the top electrode of said first acoustic resonator and the bottom electrode of said second acoustic resonator are at different electrical potential relative to each other thereby creating a capacitive potential between the top electrode of said first acoustic resonator and the bottom electrode of said second acoustic resonator.
3. An apparatus comprising:
a first acoustic resonator on a substrate;
a second acoustic resonator above said first acoustic resonator, said second acoustic resonator vertically separated from said first acoustic resonator such that little or no acoustic energy is coupled between said first acoustic resonator and said second acoustic resonator;
standoffs separating said first acoustic resonator from said second acoustic resonator; and
wherein said standoffs comprise tungsten.
4. An apparatus comprising:
a plurality of resonators fabricated on a substrate, the apparatus including a first acoustic resonator and a second acoustic resonator vertically separated above said first acoustic resonator, said second acoustic resonator acoustically separated from said first acoustic resonator;
wherein said first acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
wherein said second acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer; and
a standoff fabricated on the top electrode of said first acoustic resonator connected to the bottom electrode of said second acoustic resonator.
5. An apparatus comprising:
a plurality of resonators fabricated on a substrate, the apparatus including a first acoustic resonator and a second acoustic resonator vertically separated above said first acoustic resonator, said second acoustic resonator acoustically separated from said first acoustic resonator;
wherein said first acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
wherein said second acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer; and
a standoff between the top electrode of said first acoustic resonator and the bottom electrode of said second acoustic resonator.
6. An apparatus comprising:
a plurality of resonators fabricated on a substrate, the apparatus including a first acoustic resonator and a second acoustic resonator vertically separated above said first acoustic resonator, said second acoustic resonator acoustically separated from said first acoustic resonator;
wherein said first acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer;
wherein said second acoustic resonator includes a bottom electrode and a top electrode sandwiching a piezoelectric layer; and standoffs separating said first acoustic resonator from said second acoustic resonator,
wherein said standoffs comprise tungsten.