Exposure mask and pattern exposure method
View Patent ↗An exposure mask which is capable of reducing non-uniformity in a display such as a liquid crystal display device. A first mask pattern having pattern-forming portions and shield portions mosaically arranged therein is formed in one end portion of an exposure mask, and a second mask pattern having pattern-forming portions and shield portions arranged in a manner complementary to the first mask pattern is formed at the other end portion of the exposure mask. The exposure mask is formed such that areas between vertically or laterally adjacent ones of the shield portions, in mosaic areas where pattern-forming portions and the shield portions are mosaically arranged, are also shielded.
1. An exposure mask for use in step exposure of a pattern to be formed on a TFT substrate, the exposure mask having pattern-forming portions each formed with a pattern portion for one pixel and shield portions each for blocking transmission of exposure light for one pixel,
wherein in a joint area corresponding to an overlapping exposure area in the step exposure, a first end portion is formed in which a plurality of the pattern-forming portions and a plurality of the shield portions, each formed with a pattern portion for one pixel, are mosaically arranged with an area proportion changing along with the joint area, and a second end portion is formed opposite and complementary to the first end portion in which the area proportion changes along with the joint area,
the shield portions including between the pattern-forming portions first shield portions smaller than the pattern-forming portions and second shield portions adjacent to each other and equal in size to the pattern-forming portions.
2. The exposure mask according to claim 1 , wherein the pattern-forming portions and the shield portions are arranged mosaically, in respective units of two or more adjacent pattern-forming portions and two or more adjacent shield portions identical in number to a number of pattern-forming portions of one unit.
3. The exposure mask according to claim 1 , wherein the shield portions are arranged such that the shield portions are progressively reduced in number toward a center of the exposure mask.
4. A pattern exposure method by way of exposing a pattern to be formed on a TFT substrate by step-exposure using an exposure mask a plurality of times, the method comprising:
a first exposure step of exposing a first pattern using a mask,
a second exposure step of exposing a second pattern using the exposure mask, such that an end of the second pattern to be formed in adjacent to the first pattern and an end of the first pattern overlap each other,
the exposure mask including pattern-forming portions each formed with a pattern portion for one pixel and a plurality of shield portions each for blocking transmission of exposure light for one pixel,
wherein in a joint area corresponding to an overlapping exposure area in the step exposure, a first end portion is formed in which a plurality of the pattern-forming portions and a plurality of the shield portions, each formed with a pattern portion for one pixel, are mosaically arranged with an area proportion changing along with the joint area, and a second end portion is formed opposite and complementary to the first end portion in which the area proportion changes along with the joint area,
the shield portions including between the pattern-forming portions first shield portions that are smaller than the pattern-forming portions and second shield portions that are adjacent to each other and equal in size to the pattern-forming portions.