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App. No. 10/796,274 · Confirmation No. 9386

Methods of forming tungsten or tungsten containing films

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2007-02-28 REM Applicant Arguments/Remarks Made in an Amendment 4 View
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2006-09-28 CTNF Non-Final Rejection 8 View
2006-09-28 1449 List of References cited by applicant and considered by examiner 3 View
2006-09-28 892 List of references cited by examiner 1 View
2006-07-18 WFEE Fee Worksheet (SB06) 1 View
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2006-07-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2006-01-10 CTNF Non-Final Rejection 5 View
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2005-10-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-10-31 CLM Claims 3 View
2005-10-31 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-10-31 LET. Miscellaneous Incoming Letter 1 View
2005-10-31 XT/ Extension of Time 1 View
2005-06-29 CTNF Non-Final Rejection 8 View
2005-06-29 FWCLM Index of Claims 1 View
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2005-04-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2005-04-01 XT/ Extension of Time 2 View
2004-12-16 CTNF Non-Final Rejection 8 View
2004-12-16 892 List of references cited by examiner 1 View
2004-12-16 1449 List of References cited by applicant and considered by examiner 2 View
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Quick Facts
App. No.
10/796,274
Filed
2004-03-10
Pub. No.
US20040214417A1
Art Unit
2823