Semiconductor apparatus utilizing a preparatory stage for a chip assembly
View Patent ↗In a semiconductor device fabricating method, a plurality of wafers each having a plurality of chips into is carried and is placed in a die bonder. Chips taken out from the plurality of wafers is bonded together, respectively, and superpose in a stack by bonding layers to form a chip assembly. The chip assembly to a die pad by a bonding layer is bonded. Thus, the die bonder is able to bond the chip assembly consisting of the plurality of chips to the die pad, so that the process time of a die bonding process for bonding the plurality of chips to the die pad is comparatively short, the semiconductor fabricating apparatus produces semiconductor devices at an improved productivity, has a comparatively small scale and needs a comparatively low equipment investment.
1. A semiconductor device fabricating apparatus comprising:
a plurality of wafer holders for holding a plurality of wafers, respectively;
a chip conveying device for conveying one chip from each of said plurality of wafers held by said plurality of wafer holders;
a preparatory stage having a support surface on which chips conveyed from said plurality of wafers by said chip conveying device are stacked up and are bonded together by bonding layers to form a chip assembly;
a chip assembly conveying device for conveying said chip assembly from said preparatory stage onto a die pad; and
a stage on which said chip assembly is bonded to said die pad by a bonding layer.
2. The semiconductor device fabricating apparatus according to claim 1 , wherein said support surface of said preparatory stage inhibits the adhesion of said bonding layer to said support surface.