Methods for measuring optical characteristics by differential diffractive scanning
View Patent ↗Methods and systems for measuring and/or inspecting a characteristic of an optical article are provided. In one example, a method includes illuminating an optical article with a focused beam of light, detecting the light with a sensor after interacting with the optical article, determining a deflection angle of the beam of light, and determining a characteristic of the optical article based on the deflection angle. In one example, a system includes a light source, an optical element, and a sensor. The optical element focuses light from the light source to a reference location, the sensor detects the light from the reference location and generates signals associated with the intensity and position of the light received. A processor may receive the signals from the sensor and thereby determine a deflection angle of the light from the probe path.
1. A system for measuring a characteristic of an optical article, comprising:
a light source for producing light;
an optical element for focusing the light along a probe path to converge at a reference location associated with an expected position of an optical article, wherein the reference location is moved during a scan to thereby focusing at least two different positions along an optical axis of the probe path;
a sensor for detecting the light from the at least two different reference locations during the scan, wherein the sensor comprises a position sensitive diode device operable to generate two signals, a first signal associated with a location of an intensity centroid along one direction and a second signal associated with a location of an intensity centroid along a second direction, the second direction orthogonal to the first direction; and
a processor, wherein the processor is configured to receive signals from the sensor associated with each spot of received light and determine a deflection angle and a direction of the deflection angle of the light from the probe path.
2. The system of claim 1 , wherein the reference location is associated with an expected position of the surface of the optical article.
3. The system of claim 1 , wherein the reference location is associated with an expected position within the optical article.
4. The system of claim 1 , further including a stage for translating an optical article relative to the light source and the probe path in at least one dimension.
5. The system of claim 1 , further including a stage for translating an optical article relative to the light source and the probe path in three dimensions.
6. The system of claim 1 , wherein the processor is further configured to determine a characteristic of the optical article based on the deflection angle of the light at multiple locations of the optical article.
7. The system of claim 6 , wherein the characteristic includes one or more of surface flatness, a divot feature, or a peak feature of the optical article.
8. The system of claim 6 , wherein the characteristic includes an index of refraction value.
9. The system of claim 6 , wherein the characteristic includes stored information.
10. The system of claim 1 , wherein the position sensitive diode device generates two signals, a first signal associated with a location of an intensity centroid along one direction and a second signal associated with a location of an intensity centroid along a second direction, the second direction orthogonal to the first direction.
11. The system of claim 1 , further including a second optical element positioned to focus the light beam from the reference location to a pinhole filter between the second optical element and the sensor.
12. The system of claim 11 , wherein the second optical element and pinhole filter are disposed in a confocal imaging configuration.
13. The system of claim 1 , where the sensor is positioned to detect light passing through the reference location.
14. The system of claim 1 , where the sensor is positioned to detect light reflected from the reference location.
15. A method for measuring a characteristic of an optical article, comprising:
scanning an optical article with a focused beam of light;
detecting a deflection angle and a direction of the deflection angle of the focused beam of light from the optical article at multiple scan positions, wherein
the focused beam of light is focused during a scan to at least two different positions along an optical axis of the focused beam of light,
the deflection angle and a direction of the deflection angle for each of the multiple scan positions is determined from a single spot of light, and
for at least one of the multiple scan positions the focused beam converges within the optical article; and
determining a characteristic of the optical article based on the deflection angles at the multiple scan positions.
16. The method of claim 15 , wherein the scan is performed along a first and second dimension, the first and second dimension orthogonal to the path of the focused beam of light.
17. The method of claim 15 , wherein the focused beam of light from the optical article passes through a confocal imaging system.
18. The method of claim 15 , further including producing a surface relief pattern from the multiple deflection angles.
19. The method of claim 15 , further including producing an equivalent single surface plot from the multiple deflection angles.
20. The method of claim 15 , further including producing a volumetric index map.
21. The method of claim 15 , wherein the beam of light is detected with a position sensitive diode device.
22. The system of claim 21 , wherein the position sensitive diode device is operable to generate two signals, a first signal associated with a location of an intensity centroid along one direction and a second signal associated with a location of an intensity centroid along a second direction, the second direction orthogonal to the first direction.
23. A system for measuring a characteristic of an optical article, comprising:
a light source for producing light;
an optical element for focusing the light along a probe path to converge at a reference location associated with an expected position of an optical article, the reference location within the optical article or on a surface thereof;
a sensor for detecting the light from the reference location, wherein the sensor comprises a position sensitive diode device operable to generate two signals, a first signal associated with a location of an intensity centroid along one direction and a second signal associated with a location of an intensity centroid along a second direction, the second direction orthogonal to the first direction;
a second optical element positioned to focus the light beam from the reference location to a pinhole filter between the second optical element and the sensor; and
a processor, wherein the processor is configured to receive signals from the sensor associated with a single spot of received light and determine a deflection angle and a direction of the deflection angle of the light from the probe path.
24. The system of claim 23 , wherein the second optical element and pinhole filter are disposed in a confocal imaging configuration.
25. The system of claim 23 , wherein the processor is further configured to determine a characteristic of the optical article based on the deflection angle of the light at multiple locations of the optical article.
26. The system of claim 23 , wherein the characteristic includes one or more of surface flatness, a divot feature, or a peak feature of the optical article.
27. The system of claim 23 , wherein the characteristic includes an index of refraction value.
28. The system of claim 23 , wherein the characteristic includes stored information.