Electronic component including piezo-electric resonator mounted by face-down bonding with a required die shear strength
View Patent ↗In an electronic component having a piezo-electric resonator 10 formed on an element substrate 11 and obtaining a signal having a predetermined resonant frequency by a bulk wave propagating within a piezo-electric film 15 , a mounting substrate 19 on which the piezo-electric resonator 10 is mounted by face-down bonding through N bumps 18 , when a maximum diameter of said N bumps 18 is defined as D μm, die shear strength of said N bumps 18 is not smaller than ND/6 (g), preferably, not smaller than ND/3.6 (g).
1. An electronic component, comprising:
a piezo-electric resonator which is formed on an element substrate and which has a piezo-electric film, said piezo-electric resonator obtaining a signal having a predetermined resonant frequency by a bulk wave propagating within said piezo-electric film;
a mounting substrate on which said piezo-electric resonator is mounted by a face-down bonding through N electrically connected projecting portions; and
when a maximum diameter of said N electrically connected projecting portions is defined as D μm after said piezo-electric resonator is mounted on said mounting substrate, die shear strength of said N electrically connected projecting portions being not smaller than ND/6 (g).
2. An electronic component as claimed in claim 1 , wherein said die shear strength of said N electrically connected projecting portions being not smaller than ND/3.6 (g).
3. An electronic component as claimed in claim 1 , wherein said N electrically connected projecting portions are formed by gold.
4. An electronic component as claimed in claim 1 , wherein said piezo-electric resonator is an SMR type piezo-electric resonator.
5. An electronic component as claimed in claim 1 , wherein said piezo-electric resonator has an acoustic multi-layer film between said element substrate and said piezo-electric film.
6. An electronic component as claimed in claim 1 , wherein a couple of said piezoelectric resonators are mounted on said mounting substrate, one being a transmission side filter for processing a transmission signal while another being a reception side filter for processing a reception signal.