Glass molding die and renewing method thereof
View Patent ↗A glass molding die and renewing method thereof. The molding die for molding glass includes a substrate, a first noble metal layer overlying the substrate, a second noble metal layer overlying the first noble metal layer, a carbon-containing third noble metal layer overlying the second noble metal layer, and a DLC passivation film overlying the third noble metal layer. In addition, the carbon-containing third noble metal layer and the DLC passivation film can be easily renewed.
1. A renewing method for a glass molding die, comprising:
providing a used glass molding die comprising a substrate, a first noble metal layer overlying the substrate, a second noble metal layer overlying the first noble metal layer, a carbon-containing third noble metal layer directly on the second noble metal layer, and a diamond-like carbon (DLC) passivation film directly on the third noble metal layer;
removing the passivation film and partially removing the third noble metal layer using oxygen plasma;
grinding and polishing the molding die to completely remove the third noble metal layer;
cleaning the polished molding die;
forming a fourth noble metal layer directly on the second noble metal layer; and
forming a second passivation film directly on the fourth noble metal layer, wherein the second passivation film comprises the same material as the passivation film directly on the third noble metal layer.
2. The method as claimed in claim 1 , wherein the substrate comprises tungsten carbide.
3. The method as claimed in claim 1 , wherein the first noble metal layer comprises Ni-containing Ir—Re alloy.
4. The method as claimed in claim 1 , wherein the thickness of first noble metal layer comprises about 0.3 to 0.6 μm.
5. The method as claimed in claim 1 , wherein the second noble metal layer comprises Ir—Re alloy.
6. The method as claimed in claim 1 , wherein the thickness of second noble metal layer is about 0.3 to 0.6 μm.
7. The method as claims in claim 1 , wherein the thickness of the third noble metal layer is about 0.3 to 0.6 μm.
8. The method as claimed in claim 1 , wherein the third noble metal layer comprises carbon-containing Ir—Re alloy with C, Ir, and Re atoms therein arranged as superlattice.
9. The method as claimed in claim 1 , wherein the third noble metal layer comprises carburized Ir—Re alloy.
10. The method as claimed in claim 1 , wherein the fourth noble metal layer comprises the same material as the third noble metal layer.
11. The method as claimed in claim 1 , wherein the fourth noble metal layer comprises carbon-containing Ir—Re alloy with C, Ir, and Re atoms therein arranged as superlattice.
12. The method as claimed in claim 11 , further comprising forming the fourth noble metal layer using co-sputtering with multiple targets.
13. The method as claimed in claim 11 , wherein carbon concentration in the fourth noble metal layer is approximately 20% or more.
14. The method as claimed in claim 1 , wherein the fourth noble metal layer comprises carburized Ir—Re alloy.
15. The method as claimed in claim 14 , wherein forming the fourth noble metal layer further comprises:
forming a Ir—Re alloy layer overlying the second noble metal layer; and
implanting carbon ions into a surface of the Ir—Re alloy layer, thereby carburizing the Ir—Re alloy layer.
16. The method as claimed in claim 14 , wherein carbon concentration in the carburized surface of the fourth noble metal layer is approximately 20% or more.
17. The method as claimed in claim 1 , wherein the thickness of second passivation film is about 0.01 to 0.3 μm.
18. The method as claimed in claim 1 , wherein the second passivation film has a molding surface.