Multi-nozzle ink jet head
View Patent ↗A multi-nozzle ink jet head having a diaphragm that effectively utilizes the force generated by thin-film piezoelectric elements is disclosed. The head ( 2 ) has a head substrate ( 28 ) in which are formed a plurality of nozzles ( 39 ) and a plurality of pressure chambers ( 29 ), a multi-layer diaphragm ( 23 - 1, 23 - 2 ), piezoelectric elements ( 27 ), and individual electrodes ( 26 ). By making the thickness of the common electrode layer ( 23 - 1 ) of the multi-layer diaphragm be thin but such that problems do not occur during multi-pin driving, optimization of the rigid layer becomes possible, and hence it is possible to use the force generated by the thin-film piezoelectric elements efficiently in ink ejection.
1. A multi-nozzle ink jet head having a plurality of nozzles, comprising:
a head substrate in which are formed said plurality of nozzles and a plurality of pressure chambers;
a diaphragm that comprises a common electrode layer and a rigid layer and covers each of said plurality of pressure chambers;
a plurality of piezoelectric elements provided on said diaphragm in correspondence with said pressure chambers; and
a plurality of individual electrodes provided on said piezoelectric elements in correspondence with said piezoelectric elements;
wherein a low-resistance layer is provided on said common electrode layer in a position parallel to a row of said piezoelectric elements.
2. A multi-nozzle ink jet head having a plurality of nozzles, comprising:
a head substrate in which are formed said plurality of nozzles and a plurality of pressure chambers;
a diaphragm that comprises a common electrode layer and a rigid layer and covers each of said plurality of pressure chambers;
a plurality of piezoelectric elements provided on said diaphragm in correspondence with said pressure chambers; and
a plurality of individual electrodes provided on said piezoelectric elements in correspondence with said piezoelectric elements;
wherein a low-resistance layer is provided on said common electrode layer in a position parallel to a row of said piezoelectric elements, and
said common electrode layer has a plurality of earth contacts.
3. The multi-nozzle ink jet head according to claim 2 , wherein a plurality of contact parts are provided for exposing the earth contacts of said common electrode layer from said head.
4. The multi-nozzle ink jet head according to claim 3 , wherein said plurality of contact parts are provided on said low-resistance layer.