Electronic component having a resonator and fabrication process
An electronic component ( 1 ) includes a substrate ( 2 ) and at least two piezoelectric resonators ( 3, 4 ) each having an active element ( 6, 9 ), a lower electrode ( 5, 8 ) and an upper electrode ( 7, 10 ). The lower electrode ( 5 ) of the first resonator ( 3 ) is made of a material that is different from that of the lower electrode ( 8 ) of the second resonator ( 4 ) such that the resonators exhibit different resonance frequencies.
1. An electronic component comprising:
a substrate and at least two piezoelectric resonators each having an active element, a lower electrode and an upper electrode, wherein the lower electrode of the first resonator is made of a material that is different from that of the lower electrode of the second resonator such that the resonators exhibit different resonance frequencies, each resonator including a lower electrode, an active element and an upper electrode, the active element of a first resonator being made of a material that is different from that of the active element of a second resonator.
2. The electronic component according to claim 1 , wherein the resonance frequencies differ by at least 10%.
3. The electronic component according to claim 1 , wherein each resonator includes a lower electrode, an active element and an upper electrode, the lower electrode of a first resonator being of different thickness from that of the lower electrode of a second resonator.
4. The electronic component according to claim 1 , wherein each resonator includes a lower electrode, an active element and an upper electrode, the upper electrode of a first resonator being made of a material that is different from that of the upper electrode of a second resonator.
5. The electronic component according to claim 1 , wherein each resonator includes a lower electrode, an active element and an upper electrode, the upper electrode of a first resonator being of thickness that is different from that of the upper electrode of a second resonator.
6. The electronic component according to claim 1 , wherein each resonator includes a lower electrode, an active element and an upper electrode, the active element of a first resonator being of thickness that is different from that of the active element of a second resonator.
7. The electronic component according to claim 1 , wherein it includes at least three resonators exhibiting resonance frequencies belonging to at least three different frequency bands.
8. The electronic component according to claim 1 , wherein it includes four resonators exhibiting resonance frequencies belonging to four different frequency bands.
9. The electronic component according to claim 1 , wherein the electrodes are made of a material chosen from aluminum, copper, molybdenum, nickel, titanium, niobium, silver, gold, tantalum, lanthanum, platinum and tungsten.
10. The electronic component according to claim 1 , wherein the active element includes crystalline aluminum nitride, zinc oxide, zinc sulphide, ceramic including LiTaO 3 , LiNbO 3 , PbTiO 3 , PbZrTiO 3 , KNbO 3 and/or lanthanum.
11. The electronic component according to claim 1 , wherein the active element has a thickness of between 0.5 and 5 m.
12. The electronic component according to claim 1 , wherein the electrodes have a thickness of less than 1 m.