Semiconductor integrated circuit device
View Patent ↗In a semiconductor integrated circuit device, semiconductor elements formed in active regions included in a first element formation portion (stress transition region) in a peripheral circuit formation portion are not electrically driven, while only semiconductor elements of a second element formation portion (steady stress region) are electrically driven. Therefore, the second element formation portion in the peripheral circuit formation portion is located away from an outer STI region so as to be hardly affected by compressive stress.
1. A semiconductor integrated circuit device comprising:
an outer isolation region isolating a function block from another; and
an inner isolation region isolating a plurality of devices from one another in the function block,
wherein the plurality of devices are formed on an outer active region and an inner active region,
the outer active region is formed adjacent to the outer isolation region,
the inner active region is formed apart from the outer isolation region, with the outer active region interposed therebetween,
only the plurality of the devices of the inner active region are electrically driven, and
one element of the outer active region has the same plane dimensions as one element of the inner active region.
2. The semiconductor integrated circuit device of claim 1 , wherein
the outer active region has a stress resulting from a material constituting the outer isolation region, the stress varying depending on the distance between the outer active region and the outer isolation region, and
the inner active region has a stress resulting from a material constituting the outer isolation region, the stress being constant regardless of the distance between the inner active region and the outer isolation region.
3. The semiconductor integrated circuit device of claim 1 ,
wherein the outer isolation region has the same width as that of the inner isolation region.
4. The semiconductor integrated circuit device of claim 1 , wherein
the inner and outer isolation regions have the minimum dimension of the design rule.
5. The semiconductor integrated circuit device of claim 1 , further comprising:
a dummy active region formed adjacent to the outer active region with the outer isolation region interposed therebetween,
wherein
one element of the dummy active region has the same plane dimensions as one element of the outer active region.
6. The semiconductor integrated circuit device of claim 1 , wherein the ratio of total area of element patterns in the dummy regions to unit area is identical with that of total area of element patterns in the active regions to unit area.
7. The semiconductor integrated circuit device of claim 1 , wherein
the outer isolation region has the same width as that of the inner isolation region.
8. The semiconductor integrated circuit device of claim 1 , wherein
the outer and inner active regions have at least two kinds of different planar shapes, and said at least two kinds of different planar shapes are placed one after another in a predetermined cycle.
9. The semiconductor integrated circuit device of claim 1 , wherein
the outer isolation region has a larger width than that of the inner isolation region.
10. The semiconductor integrated circuit device of claim 5 ,
wherein the outer and inner active regions have at least two kinds of different planar shapes, said at least two kinds of different planar shapes are placed one after another in a predetermined cycle.