Substrate for electronic device, electronic device and methods of manufacturing same
View Patent ↗A substrate for an electronic device comprises a base, an adhesion film stacked on the base, and a conductor film stacked on the adhesion film. The adhesion film is a non-epitaxial film including a crystal having a wurtzite crystal structure. The electronic device comprises the substrate and a functional film having a specific function and disposed on the substrate.
1. A substrate for an electronic device comprising:
a base;
an adhesion film stacked on the base; and
a conductor film stacked on the adhesion film, wherein
the adhesion film is a non-epitaxial film including a crystal having a wurtzite crystal structure.
2. The substrate according to claim 1 , wherein the adhesion film is a polycrystalline film.
3. The substrate according to claim 1 , wherein the adhesion film is a film oriented such that a (0001) plane of the wurtzite crystal structure is parallel to a surface of the base.
4. The substrate according to claim 1 , wherein the adhesion film has an arithmetic mean roughness of 10 nanometers or smaller.
5. The substrate according to claim 1 , wherein the conductor film is a film that includes a crystal having a face-centered cubic lattice structure and is oriented such that a (111) plane of the face-centered cubic lattice structure is parallel to a surface of the base.
6. The substrate according to claim 1 , wherein the conductor film is a film that includes a crystal having a hexagonal close-packed structure and is oriented such that a (0001) plane of the hexagonal close-packed structure is parallel to a surface of the base.
7. The substrate according to claim 1 , wherein at least a portion of the base that touches the adhesion film is amorphous.
8. An electronic device comprising a substrate for the electronic device and a functional film having a specific function and disposed on the substrate, the substrate incorporating:
a base;
an adhesion film stacked on the base; and
a conductor film stacked on the adhesion film, wherein
the adhesion film is a non-epitaxial film including a crystal having a wurtzite crystal structure.
9. The electronic device according to claim 8 , wherein the functional film is any of a piezoelectric film, a dielectric film and a semiconductor film.