Thermal actuator
View Patent ↗An asymmetric MEMS thermal actuator device includes a base portion, typically a pair of bond pads, and an actuator element connected to the base portion by a flexure portion. The actuator element has a first arm and a second arm alongside the first arm and spaced from the first arm. The second arm is wider than the first arm so that the actuator element deflects about the flexure element due to differential heating in the first and second arms when an electrical current is passed therethrough. A cut-out portion is provided in the second arm adjacent the first arm so as to increase the spacing therefrom over at least a portion of the second arm. Preferably, a heat sink is also provided laterally adjacent the second arm.
1. An asymmetric MEMS thermal actuator device comprising:
a base portion; and
an actuator element connected to said base portion by a flexure portion, said actuator element comprising a first arm and a second arm extending alongside said first arm and being spaced therefrom, said first and second arms lying in a substantially common plane, and said first and second arms each having a proximal end and a distal end, said first and second arms being electrically interconnected at said distal end, and said second arm being wider than said first arm so that said actuator element deflects about said flexure element portion in said common plane due to differential heating in said first and second arms when an electrical current is passed through said first and second arms from the proximal end of one of said arms to the proximal end of the other of said arms; and
wherein a recess facing said first arm is provided in said second arm so as to increase the spacing of said second arm from said first arm in said recess.
2. An asymmetric MEMS thermal actuator device as claimed in claim 1 , wherein said recess is rectangular in shape.
3. An asymmetric MEMS thermal actuator device as claimed in claim 1 , wherein said base portion comprises a pair of bond pads attached to said respective first and second arms at their proximal ends.
4. An asymmetric MEMS thermal actuator device as claimed in claim 1 , further comprising a heat sink laterally adjacent said second arm.
5. An asymmetric MEMS thermal actuator device as claimed in claim 4 , wherein said heat sink tapers away from said actuator element from a root portion of said heat sink to a tip thereof to permit deflection of said actuator element.
6. An asymmetric MEMS thermal actuator device as claimed in claim 5 , wherein said heat sink forms part of the same layer as said actuator element.
7. An asymmetric MEMS thermal actuator device as claimed in claim 5 , wherein said same layer is a silicon layer.
8. An asymmetric MEMS thermal actuator device as claimed in claim 4 , wherein said heat sink forms part of a substrate for said actuator element and is located beside and below said actuator element so that as said actuator element deflects, said actuator element partly overlaps said heat sink.
9. An asymmetric MEMS thermal actuator device as claimed in claim 1 , wherein said actuator element is made of a silicon layer deposited on an insulating substrate.
10. An asymmetric MEMS thermal actuator device as claimed in claim 1 , wherein said insulator is silicon oxide deposited on a silicon substrate.
11. An asymmetric MEMS thermal actuator device as claimed in claim 1 , wherein the depth of said recess is about half the width of said cold arm.
12. An asymmetric MEMS thermal actuator device as claimed in claim 1 , wherein the depth of the recess is about 50 microns.
13. An asymmetric MEMS thermal actuator device comprising:
a base portion; and
an actuator element connected to said base portion by a flexure portion, said actuator element comprising a first arm and a second arm alongside said first arm and being spaced therefrom, said second arm being wider than said first arm so that said actuator element deflects about said flexure portion due to differential heating in said first and second arms when an electrical current is passed through said first and second arms;
a protruding heat sink located to the side of said actuator element; and
wherein a recess facing said first arm is provided in said second arm so as to increase the spacing of said second arm from said first arm in said recess.
14. An asymmetric MEMS thermal actuator device as claimed in claim 13 , wherein said heat sink is at the same level as said actuator element.
15. An asymmetric MEMS thermal actuator device as claimed in claim 13 , wherein said heat sink is below said actuator element.