IP Library Patent Application 10820150
Patent Application Utility
App. No. 10/820,150 · Confirmation No. 6676

Lithographic apparatus and device manufacturing method

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2006-03-10 ABN Abandonment 2 View
2006-03-10 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-01 CTNF Non-Final Rejection 7 View
2005-09-01 1449 List of References cited by applicant and considered by examiner 2 View
2005-09-01 892 List of references cited by examiner 1 View
2005-09-01 FOR Foreign Reference 12 View
2005-09-01 FOR Foreign Reference 13 View
2005-09-01 FOR Foreign Reference 15 View
2005-09-01 SRFW Search information including classification, databases and other search related notes 1 View
2005-08-30 SRNT Examiner's search strategy and results 1 View
2004-12-10 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-12-10 FOR Foreign Reference 14 View
2004-08-23 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2004-08-23 OATH Oath or Declaration filed 2 View
2004-06-21 PEFN Pre-Exam Formalities Notice 2 View
2004-06-10 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-04-20 FRPR Certified Copy of Foreign Priority Application 32 View
2004-04-08 TRNA Transmittal of New Application 2 View
2004-04-08 SPEC Specification 15 View
2004-04-08 CLM Claims 3 View
2004-04-08 ABST Abstract 1 View
2004-04-08 DRW Drawings-only black and white line drawings 3 View
2004-04-08 ADS Application Data Sheet 2 View
2004-04-08 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/820,150
Filed
2004-04-08
Pub. No.
US20040257547A1
Art Unit
2851