Patent Application
Utility
App. No. 10/820,150
· Confirmation No. 6676
Lithographic apparatus and device manufacturing method
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-03-10 | ABN |
Abandonment | 2 | View | |
| 2006-03-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2005-09-01 | CTNF |
Non-Final Rejection | 7 | View | |
| 2005-09-01 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2005-09-01 | 892 |
List of references cited by examiner | 1 | View | |
| 2005-09-01 | FOR |
Foreign Reference | 12 | View | |
| 2005-09-01 | FOR |
Foreign Reference | 13 | View | |
| 2005-09-01 | FOR |
Foreign Reference | 15 | View | |
| 2005-09-01 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2005-08-30 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-12-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2004-12-10 | FOR |
Foreign Reference | 14 | View | |
| 2004-08-23 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 4 | View | |
| 2004-08-23 | OATH |
Oath or Declaration filed | 2 | View | |
| 2004-06-21 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2004-06-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2004-04-20 | FRPR |
Certified Copy of Foreign Priority Application | 32 | View | |
| 2004-04-08 | TRNA |
Transmittal of New Application | 2 | View | |
| 2004-04-08 | SPEC |
Specification | 15 | View | |
| 2004-04-08 | CLM |
Claims | 3 | View | |
| 2004-04-08 | ABST |
Abstract | 1 | View | |
| 2004-04-08 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2004-04-08 | ADS |
Application Data Sheet | 2 | View | |
| 2004-04-08 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Armand Eugene Albert Koolen
Eindhoven, NETHERLANDS
Edwin Wilhelmus Marie Knols
Eindhoven, NETHERLANDS
Manfred Maul
Aalen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/67
G03F7/70141
G03F7/70158
Prosecution
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- 081468-0309142
- Confirmation No.
- 6676
Foreign Priority
03076142.3
·
2003-04-17
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20040257547A1
- Pub. Date
- 2004-12-23
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2022-07-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-08-23
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Quick Facts
- App. No.
- 10/820,150
- Filed
- 2004-04-08
- Pub. No.
- US20040257547A1
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
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