Mirror substrate, mirror body using the same, and optical device using mirror body
View Patent ↗The present invention adopts a particle dispersed silicon material, comprising silicon carbide as dispersion particles, as a mirror substrate, subjects the mirror substrate to mirror finish polishing to form a mirror body, forms a reflecting film on the mirror body to form a mirror, and uses the mirror to form a large aperture optical system.
1. A mirror substrate, wherein the substrate is made of a particle-dispersed silicon material composed of silicon carbide and silicon, and the surface of said substrate to be used as a reflecting surface is polished to a mirror finish,
wherein the Vickers hardness of said mirror substrate is 1,500 Hv or more, the 3 point bending hardness is 500 MPa or more, and the thermal conductivity is 100 W/m-K or more.
2. The mirror substrate according to claim 1 , wherein said mirror is concave.
3. The mirror substrate according to claim 1 , wherein said mirror is convex.
4. The mirror substrate according to claim 1 , wherein said mirror is planar.
5. The mirror substrate according to claim 1 , wherein the maximum diameter of the concavities and convexities or pores on the surface of said mirror substrate is 40 nm or less.
6. The mirror substrate according to claim 1 , wherein the maximum diameter of the concavities and convexities or pores is 20 nm or less.
7. The mirror substrate according to claim 5 or 6 , wherein the concavities and convexities or pores on the surface of said mirror occupy 3% or less of the area of said mirror surface.
8. The mirror substrate of claim 1 , further comprising a reflecting film provided on a surface of said mirror substrate.
9. The mirror substrate according to claim 8 , wherein said reflecting film is made of a metal.
10. The mirror substrate according to claim 9 , wherein said metal comprises gold, aluminum, silver or rhodium.
11. The mirror substrate according to claim 8 , wherein said reflecting film comprises a multilayer dielectric film.
12. A mirror substrate, wherein the substrate is made of a particle-dispersed silicon material composed of silicon carbide and silicon, and the surface of said substrate is to be used as a reflecting surface is polished to a mirror finish,
wherein the maximum diameter of the concavities and convexities, or pores on the surface of said mirror substrate is 40 nm or less.
13. A mirror substrate made of a particle-dispersed silicon material composed of silicon carbide and silicon, and the surface of said substrate is to be used as a reflecting surface is polished to a mirror finish,
wherein a maximum diameter of concavities and convexities, or pores is 20 nm or less.
14. The mirror substrate according to claim 12 , wherein the concavities and convexities, and pores on the surface of said mirror occupy 2% or less of the area of said mirror surface.
15. The mirror substrate according to claim 13 wherein the concavities and convexities, and pores on the surface of said mirror occupy 2% or less of the area of said mirror surface.
16. An optical device, wherein the mirror substrate as in any one of claims 8 , 11 and 12 is employed as a reflecting mirror.
17. The optical device according to claim 16 , wherein said optical device is a reflecting telescope.
18. The optical device according to claim 17 , wherein the optical device comprises a mirror reflecting the incident light beam and thereafter focusing the incident light beam on a detector.
19. The optical device according to claim 17 , further comprising a detector, wherein said detector of said optical device is an image sensor.
20. The optical device according to claim 16 , wherein said optical device is a reflecting communication antenna.
21. The optical device according to claim 20 further comprising a detector, wherein said detector of said optical device is a photodetector.
22. The optical device according to claim 16 , wherein the optical device comprises a first mirror for reflecting the incident light beam and thereafter focusing the light beam on a second mirror and the second mirror reflecting said focused light beam and thereafter focusing the light beam on a detector.
23. The optical device according to any one of claim 16 , further comprising:
structural members for supporting said mirror substrate,
wherein said structural members comprise said particle dispersed silicon material composed of silicon carbide and silicon.