Alignment marks and manufacturing method for the same
View Patent ↗Alignment marks are formed when source and drain electrodes of a TFT are formed and thereon a thick red filter is formed. So that, the following respective color layers can be made thin on the red filter. Also, the exposure alignment laser permeates in an exposure step, and thereby the alignment marks can be accurately detected.
1. A manufacturing method for alignment marks comprising the steps of:
forming a thin-film transistor including at least a gate electrode, a gate insulating film, a semiconductor thin film, source and drain electrodes on a wafer;
forming alignment reference marks by using the same materials as those of at least one of the gate electrode, the semiconductor film, and the source and drain electrodes in an area other than a formation area for the thin-film transistor at the same time when the gate electrode, the semiconductor film and the source and drain electrodes are formed:
forming red filter alignment reference marks comprising a red filter so as to cover the alignment reference marks; and
then, performing alignment of the following step pattern based on the alignment reference marks below the red filter alignment marks.
2. The manufacturing method for alignment marks as set forth in claim 1 , wherein:
the alignment reference marks are formed at the same time as source and drain electrodes with a shading property are formed, and alignment is performed by means of light reflection caused by the alignment reference marks.