Stacked capacitor and method for fabricating same
View Patent ↗The invention relates to a stacked capacitor ( 10 ) comprising a silicon base plate ( 16 ), a poly-silicon center plate ( 32 ) arranged above the base plate ( 16 ), a lower gate-oxide dielectric ( 26 ) arranged between the base plate ( 16 ) and the center plate ( 32 ), a cover plate ( 36 ) made of a metallic conductor and arranged above the center plate ( 32 ), and an upper dielectric ( 34 ) arranged between the center plate ( 32 ) and the cover plate ( 36 ). The cover plate ( 36 ) and the base plate ( 16 ) are electrically connected to each other and together form a first capacitor electrode. The center plate ( 32 ) forms a second capacitor electrode. The invention further relates to an integrated circuit with such a stacked capacitor, as well as to a method for fabrication of a stacked capacitor as part of a CMOS process.
1. A stacked capacitor comprising:
a silicon base plate;
a poly-silicon center plate arranged above the base plate;
a lower gate-oxide dielectric arranged between the base plate and the center plate;
a cover plate made of a metallic conductor and arranged above the center plate; and
an upper dielectric arranged between the center plate and the cover plate, the cover plate and the base plate being electrically connected to each other and together forming a first capacitor electrode, the center plate forming a second capacitor electrode.
2. The stacked capacitor according to claim 1 , wherein the poly-silicon center plate is provided with a silicide layer.
3. The stacked capacitor according to claim 1 , wherein the upper dielectric is an oxide.
4. The stacked capacitor according to claim 1 , wherein the upper dielectric is a nitride.
5. The stacked capacitor according to claim 1 , wherein the cover plate comprises titanium nitride or a titanium alloy.
6. The stacked capacitor according to claim 5 , wherein the cover plate comprises TiW.
7. The stacked capacitor according to claim 1 , wherein the silicon base plate has a surface orientated towards the center plate, the surface having a connecting portion that adjoins the lower dielectric, and a contact portion via which the base plate is contacted.
8. The stacked capacitor according to claim 7 , wherein the contact area is provided with a silicide layer to facilitate contactability.
9. An integrated circuit comprising a stacked capacitor according to claim 1 .