Semiconductor device and manufacturing method thereof
A semiconductor device includes: a substrate having a main surface, a rear surface and four side surfaces; a semiconductor element formed on the main surface of the substrate; a notch formed in at least one bottom part of the side surfaces of the substrate; and a curved surface provided at an intersection of a side surface of the notch and the rear surface of the substrate.
1. A manufacturing method of a semiconductor device comprising:
forming a groove along a dicing line in a semiconductor wafer, the semiconductor wafer having a first surface on which a semiconductor element is formed and a second surface opposite to the first surface, the groove being formed on the second surface;
rounding an edge portion where a side surface of the groove and the second surface of the substrate cross by etching the semiconductor wafer from the second surface side, such that part of the groove is left; and
cutting the semiconductor wafer from the first surface side along the dicing lines and dividing the semiconductor wafer into chips.
2. The manufacturing method of the semiconductor device according to claim 1 , further comprising:
performing a pre-process of polishing the semiconductor wafer from the second surface side to a predetermined thickness before forming the groove.
3. The manufacturing method of the semiconductor device according to claim 1 , further comprising:
attaching an adhesive film onto the second surface of the semiconductor wafer between the etching and the dividing of the semiconductor wafer.
4. The manufacturing method of the semiconductor device according to claim 1 , further comprising:
forming a conductive film or an insulating film on the second surface of the semiconductor wafer between the etching and the dividing of the semiconductor wafer.
5. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the groove is formed to have a side surface almost vertical to the first surface or the second surface of the semiconductor wafer.
6. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the groove is formed to have an almost V-shaped section.
7. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the etching includes mechanical processing.
8. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the etching includes chemical mechanical processing.
9. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the etching includes chemical mechanical processing.
10. The manufacturing method of the semiconductor device according to claim 1 ,
wherein the edge portion has a curved surface with a curvature radius equal to or more than a depth of a flaw which would be caused to at least one of the chips without the rounding of the edge portion.
11. The manufacturing method of the semiconductor device according to claim 10 ,
wherein the curvature radius is from approximately 0.5 μm to approximately 50 μm.
12. The manufacturing method of a semiconductor device according to claim 10 ,
wherein the curved surface is provided so that formation of an inflexion point is avoided.