Resistor protective layer for micro-fluid ejection devices
View Patent ↗A heater chip for a micro-fluid ejection device having enhanced adhesion between a resistor layer and a protective layer. The heater chip includes a substrate, a resistive layer deposited adjacent to the substrate, and a substantially non-conductive protective layer adjacent to the resistive layer. The protective layer is selected from a titanium-doped diamond-like carbon thin film layer, and a single thin film diamond-like carbon layer having at least a first surface comprised of more than about 30 atom % titanium.
1. An ink jet printhead for an ink jet printer, the printhead comprising a nozzle plate attached to a heater chip, the heater chip including a substrate, a resistive layer deposited adjacent to the substrate, and a substantially non-conductive protective layer applied to the resistive layer, the protective layer being selected from the group consisting of a titanium-doped diamond-like carbon thin film layer, and a single thin film diamond-like carbon layer having at least a first surface comprised of more than about 30 atom % titanium.
2. The printhead of claim 1 wherein the protective layer has a thickness ranging from about 1000 to about 5000 Angstroms.
3. The printhead of claim 1 wherein the protective layer comprises a titanium-doped diamond-like carbon layer containing up to about 15 atom % titanium.
4. The printhead of claim 1 wherein the protective layer comprises a single thin film diamond-like carbon layer having at least a first surface comprised of more than about 50 atom % titanium.
5. The printhead of claim 4 wherein a second opposing surface of the diamond-like carbon layer contains from about 5 to about 15 atom % titanium.
6. The printhead of claim 5 wherein the thin film layer has a central bulk layer consisting essentially of diamond-like carbon.
7. The printhead of claim 1 wherein the protective layer comprises a titanium-doped diamond-like carbon layer having a titanium concentration gradient therein from a first surface to a second surface of the layer.
8. A heater chip for a micro-fluid ejection device comprising a substrate, a resistive layer deposited adjacent to the substrate, and a substantially non-conductive protective layer applied to the resistive layer, the protective layer being selected from the group consisting of a titanium-doped diamond-like carbon thin film layer, a single thin film diamond-like carbon layer having at least a first surface comprised of more than about 30 atom % titanium, and two diamond-like carbon layers wherein a first layer is a silicon-doped diamond-like carbon layer and a second layer is a titanium-doped diamond-like carbon layer.
9. The heater chip of claim 8 wherein the protective layer has a thickness ranging from about 1000 to about 5000 Angstroms.
10. The heater chip of claim 8 wherein the protective layer comprises a titanium-doped diamond-like carbon layer containing up to about 15 atom % titanium.
11. The heater chip of claim 8 wherein the protective layer comprises a single thin film diamond-like carbon layer having at least a first surface comprised of more than about 50 atom % titanium.
12. The heater chip of claim 11 wherein a second opposing surface of the diamond-like carbon layer contains from about 5 to about 15 atom % titanium.
13. The heater chip of claim 12 wherein the thin film layer has a central bulk layer consisting essentially of diamond-like carbon.
14. The heater chip of claim 8 wherein the protective layer comprises a titanium-doped diamond-like carbon layer having a titanium concentration gradient therein from a first surface to a second surface of the layer.
15. The heater chip of claim 8 further comprising a cavitation layer selected from titanium metal and tantalum metal deposited adjacent to the protective layer.