IP Library Granted Patent US 6,945,119
Granted Patent B2
US 6,945,119 · App. 10/852,896 · Granted Sep 20, 2005

Apparatus and methods for heat loss pressure measurement

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Quick Facts
Patent No.
US 6,945,119
App. No.
10/852,896
Granted
Sep 20, 2005
Kind
B2
Abstract

A heat loss gauge for measuring gas pressure in an environment includes a resistive sensing element and a resistive compensating element. The resistive compensating element is in circuit with the sensing element and is exposed to a substantially matching environment. An electrical source is connected to the sensing element and the compensating element for applying current through the elements. The current through the sensing element is substantially greater than the current through the compensating element. Measuring circuitry is connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

Claims (34)

1. A heat loss gauge for measuring gas pressure in an environment comprising:

a resistive sensing element;

a resistive compensating element in circuit with the sensing element and being exposed to a substantially matching environment;

at least one electrical source connected to the sensing element and compensating element for applying current through the elements in a manner to provide independent heating of the sensing element; and

measuring circuitry connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

2. The gauge of claim 1 in which the sensing and compensating elements have substantially similar temperature response and physical characteristics.

3. A method of measuring gas pressure in an environment comprising:

providing a resistive sensing element;

providing a resistive compensating element that is in circuit with the sensing element and is exposed to a substantially matching environment;

applying current through the sensing element and compensating element from at least one electrical source in a manner to provide independent heating of the sensing element; and

with measuring circuitry connected to the sensing element and the compensating element, determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

4. The method of claim 3 further comprising providing the sensing and compensating elements with substantially similar temperature response and physical characteristics.

5. A heat loss gauge for measuring gas pressure in an environment comprising:

a resistive sensing element;

a resistive compensating element in circuit with the sensing element and being exposed to a substantially matching environment;

at least one electrical source connected to the sensing element and compensating element for applying current through the elements, the amount of power dissipated in the sensing element being substantially greater than the amount of power dissipated in the compensating element; and

measuring circuitry connected to the sensing element and the compensating element for determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

6. The gauge of claim 5 wherein the electrical source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element plus a constant number of ohms.

7. The gauge of claim 5 wherein the sensing element and the compensating element have the same cross sectional dimensions.

8. The gauge of claim 5 in which the sensing and compensating elements have substantially similar temperature response and physical characteristics.

9. The gauge of claim 5 further comprising feedback circuitry for controlling the current through the sensing element and the compensating element.

10. The gauge of claim 9 wherein the compensating element is in series with a non-temperature-sensitive resistive element.

11. The gauge of claim 10 wherein the electrical source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the non-temperature-sensitive resistive element.

12. A method of measuring gas pressure in an environment comprising:

providing a resistive sensing element;

providing a resistive compensating element that is in circuit with the sensing element and is exposed to a substantially matching environment;

applying current through the sensing element and compensating element from at least one electrical source, the amount of power dissipated in the sensing element being substantially greater than the amount of power dissipated in the compensating element; and

with measuring circuitry connected to the sensing element and the compensating element, determining gas pressure in the environment to which the sensing element and compensating element are exposed based on electrical response of the sensing element and the compensating element.

13. The method of claim 12 further comprising applying current from the electrical source to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element plus a constant number of ohms.

14. The method of claim 12 further comprising providing the sensing element and the compensating element with the same cross sectional dimensions.

15. The method of claim 12 further comprising providing the sensing and compensating elements with substantially similar temperature response and physical characteristics.

16. The method of claim 12 further comprising controlling the current through the sensing element and the compensating element with feedback circuitry.

17. The method of claim 16 further comprising positioning the compensating element in series with a non-temperature-sensitive resistive element.

18. The method of claim 17 further comprising applying current from the electrical source to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the non-temperature-sensitive resistive element.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
CORRECTIVE ASSIGNMENT TO CORRECT THE STATE OF INCORPORATION INSIDE ASSIGNMENT PREVIOUSLY RECORDED AT REEL: 033190 FRAME: 0755. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Oct 10, 2014
From: BROOKS AUTOMATION, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 033958/0363 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2014
From: BROOKS AUTOMATION, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 033190/0755 →