Target for sputtering and a method for manufacturing a magnetic recording medium using the target
View Patent ↗A target for sputtering includes a sputtering material layer having tilt surfaces. Sputtering material particles are emitted from the tilt surfaces in directions of their normals. Consequently, even though the target and a substrate are arranged approximately parallel and the axes of the two are coincident with each other, the particles are injected onto the substrate from oblique directions.
1. A target for sputtering, which has a shape which is approximately a disk shape, which includes a top surface and a peripheral side surface, and which comprises:
a backing plate; and
a sputtering material layer provided on the backing plate and having at least three tilt surfaces which are tilted by a specified angle with respect to a plane perpendicular to a center axis of the target when viewed from the peripheral side surface of the target.
2. The target for sputtering according to claim 1 , wherein each of the plurality of tilt surfaces is a divided partition having a sector form.
3. The target for sputtering according to claim 1 , wherein each tilt surface of the at least three tilt surfaces is tilted in a circumferential direction with respect to the plane perpendicular to the center axis of the target.
4. The target for sputtering according to claim 3 , wherein each of the plurality of tilt surfaces is a divided partition having a sector form.
5. The target for sputtering according to claim 3 , wherein each tilt surface of the at least three tilt surfaces includes a segment of a radius of the target.
6. The target for sputtering according to claim 5 , wherein each of the plurality of tilt surfaces is a divided partition having a sector form.
7. The target for sputtering according to claim 6 , wherein adjacent tilt surfaces of the at least three tilt surfaces are tilted in the same direction with respect to the plane perpendicular to the center axis of the target.
8. The target for sputtering according to claim 6 , wherein adjacent tilt surfaces of the at least three tilt surfaces are tilted in the opposite direction with respect to the plane perpendicular to the center axis of the target.
9. A method for manufacturing a magnetic recording medium using a target for sputtering, comprising the steps of: providing a target for sputtering which has a shape which is approximately disk shape, which includes a top surface and a peripheral surface, and which comprises a backing plate: and a sputtering material layer provided on the backing plate and having at least three tilt surfaces which are tilted by a specified angle with respect to a plane perpendicular to a center axis of the target when viewed from the peripheral side surface of the target; and
sputtering under conditions effective therefore so that particles of sputtering material are injected to a substrate from the target.
10. The method for manufacturing a magnetic recording medium according to claim 9 , wherein a magnetic recording layer is formed in the step of sputtering.
11. The method for manufacturing a magnetic recording medium according to claim 9 , wherein an under-layer is formed in the step of sputtering.
12. The method for manufacturing a magnetic recording medium according to claim 9 , wherein an intermediate layer is formed in the step of sputtering.
13. The method for manufacturing a magnetic recording medium according to claim 9 , wherein a soft magnetic layer is formed in the step of sputtering.
14. The method for manufacturing a magnetic recording medium according to claim 9 , wherein the target and the substrate are rotated relative to one another around the center axis during the step of sputtering.
15. The method for manufacturing a magnetic recording medium according to claim 14 , wherein a magnetic recording layer is formed in the step of sputtering.
16. The method for manufacturing a magnetic recording medium according to claim 14 , wherein an intermediate layer is formed in the step of sputtering.
17. The method for manufacturing a magnetic recording medium according to claim 11 , wherein a soft magnetic layer is formed in the step of sputtering.
18. The method for manufacturing a magnetic recording medium according to claim 17 , wherein an under-layer is formed in the step of sputtering.
19. The method for manufacturing a magnetic recording medium according to claim 9 , wherein, in the target for sputtering provided, each of the plurality of tilt surfaces is a divided partition having a sector form.
20. The method for manufacturing a magnetic recording medium according to claim 9 , wherein adjacent tilt surfaces of the at least three tilt surfaces are tilted in one of (a) the same direction with respect to the plane perpendicular to the center axis of the target or (b) in the opposite direction with respect to the plane perpendicular to the center axis of the target.