Apparatus and method for inspecting and repairing a circuit defect
An apparatus for inspecting and repairing a circuit defect is disclosed, which has a base; a substrate-supporting platform mounted on the base; a contact inspection module having at least one contact probe and a first driving-system that drives at least one contact probe to contact the circuits formed on the glass substrate and thereby inspect a circuit defect; a non-contact inspection module having at least one non-contact sensor and a second driving-system that drives at least one non-contact sensor to inspect the circuit defect in a non-contact manner; and a laser repair module having a laser head and a third driving-system that drives the laser head to go to the circuit defect and repair the circuit defect. A method for inspecting and repairing a circuit defect is also disclosed therewith.
1 . An apparatus for inspecting and repairing a circuit defect, comprising:
a base;
a substrate-supporting platform mounted on the base for supporting a glass substrate;
a contact inspection module having at least one contact probe and a first driving-system, wherein the first driving-system drives at least one contact probe to contact the circuits formed on the glass substrate and thereby to inspect a circuit defect;
a non-contact inspection module having at least one non-contact sensor and a second driving-system, wherein the second driving-system drives at least one non-contact sensor to inspect the circuit defect in a non-contact manner, and the non-contact inspection module cooperates with the contact inspection module for determining a position of the circuit defect; and
a laser repair module having a laser head and a third driving-system, wherein the third driving-system drives the laser head to go to the position of the circuit defect and to repair the circuit defect.
2 . The apparatus as claimed in claim 1 , wherein the first driving-system includes:
a first vertical driving-unit for driving at least one contact probe to move in a vertical direction relative to the glass substrate;
a first horizontal driving-unit for driving at least one contact probe to move in a horizontal direction relative to the glass substrate; and
a front-and-back driving-unit for driving at least one contact probe to move forward and backward relative to the glass substrate.
3 . The apparatus as claimed in claim 1 , wherein the second driving-system includes:
a second vertical driving-unit for driving at least one non-contact sensor to move in a vertical direction relative to the glass substrate;
a second horizontal driving-unit for driving at least one non-contact sensor to move in a horizontal direction relative to the glass substrate; and
a first linear motor driving-unit having a motor main body and a first mover that connects with the second horizontal driving-unit.
4 . The apparatus as claimed in claim 1 , wherein the third driving-system includes:
a third horizontal driving-unit for driving the laser head to move in a horizontal direction relative to the glass substrate; and
a first linear motor driving-unit having a motor main body and a second mover that connects with the third horizontal driving-unit.
5 . The apparatus as claimed in claim 1 , wherein the non-contact sensor is in an electrostatic capacitory coupling type.
6 . The apparatus as claimed in claim 2 , wherein the first vertical driving-unit has a rotary motor, a screw, and a linear guide set.
7 . The apparatus as claimed in claim 2 , wherein the first horizontal driving-unit has a linear motor.
8 . The apparatus as claimed in claim 2 , wherein the front-and-back driving-unit has a linear motor.
9 . The apparatus as claimed in claim 2 , wherein the front-and-back driving-unit has a rotary motor, a screw, and a guide set.
10 . The apparatus as claimed in claim 3 , wherein the second vertical driving-unit has a cylinder or a linear actuator.
11 . The apparatus as claimed in claim 3 , wherein the second horizontal driving-unit has a linear actuator.
12 . The apparatus as claimed in claim 4 , wherein the third horizontal driving-unit has a linear motor.
13 . The apparatus as claimed in claim 4 , wherein the third horizontal driving-unit has a rotary motor, a screw, and a guide set.
14 . A method for inspecting and repairing a circuit defect comprising:
providing an apparatus having a substrate-supporting platform, a contact inspection module having at least one contact probe and a first driving-system that drives at least one contact probe, a non-contact inspection module having at least one non-contact sensor and a second driving-system that drives at least one non-contact sensor, and a laser repair module having a laser head and a third driving-system that drives the laser head;
putting a glass substrate that waits for inspection on the substrate-supporting platform;
inspecting circuits on the glass substrate and determining the position of a circuit defect by moving at least one contact probe and at least one non-contact sensor;
moving the laser head to the circuit defect and repairing the circuit defect; and
moving the inspected and repaired glass substrate out of the substrate-supporting platform.
15 . The method as claimed in claim 14 , wherein the movement of at least one contact probe is carried out by a first driving-system, which has:
a first vertical driving-unit for driving at least one contact probe to move in a vertical direction relative to the glass substrate;
a first horizontal driving-unit for driving at least one contact probe to move in a horizontal direction relative to the glass substrate; and
a front-and-back driving-unit for driving at least one contact probe to move forward and backward relative to the glass substrate.
16 . The method as claimed in claim 14 , wherein the movement of at least one non-contact sensor is carried out by a second driving-system, which has:
a second vertical driving-unit for driving at least one non-contact sensor to move in a vertical direction relative to the glass substrate;
a second horizontal driving-unit for driving at least one non-contact sensor to move in a horizontal direction relative to the glass substrate; and
a first linear motor driving-unit having a motor main body and a first mover that connects with the second horizontal driving-unit.
17 . The method as claimed in claim 14 , wherein the movement of the laser head is carried out by a third driving-system, which has:
a third horizontal driving-unit for driving the laser head to move in a horizontal direction relative to the glass substrate; and
a first linear motor driving-unit having a motor main body and a second mover that connects with the third horizontal driving-unit.