Method and apparatus for oxidizing conductive redeposition in TMR sensors
View Patent ↗A method and apparatus for oxidizing conductive redeposition in TMR sensors is disclosed. A TMR barrier layer is etched. Redeposition material is oxidized and the barrier is healed using an oxidizing agent selected from the group consisting of ozone and water vapor.
1. A method for oxidizing conductive redeposition in tunnel magnetoresistive (TMR) structure, comprising:
forming a TMR stack comprising a first electrode comprising at least a pinned layer and an antiferromagnetic (AFM) layer, a second electrode comprising a free layer and a tunnel barrier layer;
etching at least one of the first electrode comprising at least the pinned layer and the antiferromagnetic (AFM) layer, the second electrode comprising the free layer and the tunnel barrier using a primarily physical etch process, wherein the etching redeposits etching particulates on at least a portion of the at least one of the layers; and
applying at an elevated temperature an oxidizing agent selected from the group consisting of ozone and water vapor to oxidize only at least one of the redeposited etching particulates and a portion the tunnel barrier layer damaged during the etching.
2. The method of claim 1 , wherein the applying the oxidizing agent comprises applying water vapor on a continuous basis.
3. The method of claim 1 , wherein the applying the oxidizing agent comprises applying ozone on a continuous basis.
4. The method of claim 1 , wherein the applying the oxidizing agent comprises pulsing water vapor into a chamber.
5. The method of claim 1 , wherein the applying the oxidizing agent comprises pulsing ozone into a chamber.
6. The method of claim 1 further comprising terminating the oxidized surface with layers of additional oxide that acts as an insulating spacer over the TMR structure.
7. The method of claim 1 , wherein the applying the oxidizing agent comprises applying ozone in a controlled manner and at the elevated temperature for oxidizing redeposited etching particulates.
8. The method of claim 1 , wherein the applying the oxidizing agent comprises applying water vapor in a controlled manner and at the elevated temperature for oxidizing redeposited etching particulates.
9. The method of claim 1 , wherein the applying the oxidizing agent comprises applying ozone to the tunnel barrier layer to heal the tunnel barrier layer.
10. The method of claim 1 , wherein the applying the oxidizing agent comprises applying water vapor to oxidize the redeposited etching particulates comprising a metal material.
11. The method of claim 1 further comprising a magnetic random access memory (MRAM) formed according to the method of claim 1 .
12. The method of claim 1 further comprising a magnetic read sensor for a storage device formed according to the method of claim 1 .