Semiconductor device and method for manufacturing the same
View Patent ↗A first interlayer insulation film is formed, on which a SiO 2 cap film is then formed, and degassing of moisture in the first interlayer insulation film and the SiO 2 cap film is preformed by heat treatment. Then, an Al 2 O 3 film is formed on the SiO 2 cap film. Subsequently, heat treatment is performed on the Al 2 O 3 in an oxidation atmosphere, thereby accelerating oxidation of its surface. Thereafter, on the Al 2 O 3 film, a platinum film, a PLZT film, and an IrO 2 film are formed and patterned, thereby forming a ferroelectric capacitor including an upper electrode, a capacity insulation film, and a lower electrode.
1. A semiconductor device, comprising:
an interlayer insulation film with a surface planarized;
a silicon oxide film formed on said interlayer insulation film;
an aluminum oxide film formed on said silicon oxide film; and
a ferroelectric capacitor formed on said aluminum oxide film, wherein said aluminum oxide film and said ferroelectric capacitor contact each other.
2. The semiconductor device according to claim 1 , wherein said ferroelectric capacitor has a lower electrode including a platinum film.
3. The semiconductor device according to claim 1 , further comprising a transistor connected to said ferroelectric capacitor.
4. A method for manufacturing a semiconductor device, comprising the steps of:
forming an interlayer insulation film above a semiconductor substrate;
planarizing a surface of the interlayer insulation film;
forming a silicon oxide film on the interlayer insulation film;
heating the silicon oxide film and the interlayer insulation film to remove moisture from the silicon oxide film and the interlayer insulation film;
forming an aluminum oxide film on the silicon oxide film; and
forming a ferroelectric capacitor on the aluminum oxide film, wherein said aluminum oxide film and said ferroelectric capacitor contact each other.
5. The method for manufacturing a semiconductor device according to claim 4 , further comprising, between said step of forming an aluminum oxide film and said step of forming a ferroelectric capacitor, the step of heating the aluminum oxide film in an oxidation atmosphere.
6. The method for manufacturing a semiconductor device according to claim 4 , wherein a thickness of the silicon oxide film is 300 nm or less.
7. The method for manufacturing a semiconductor device according to claim 5 , wherein a heat treatment temperature in said step of heating the silicon oxide film and the interlayer insulation film is 650 or lower.
8. The method for manufacturing a semiconductor device according to claim 5 , wherein a heat treatment temperature in said step of heating the aluminum oxide film is not higher than a heat treatment temperature in said step of heating the silicon oxide film and the interlayer insulation film.
9. A method for manufacturing a semiconductor device, comprising the steps of:
forming an interlayer insulation film above a semiconductor substrate;
planarizing a surface of the interlayer insulation film;
forming an aluminum oxide film on the interlayer insulation film;
heating the aluminum oxide film in an oxidation atmosphere; and
after said step of heating begins, forming a ferroelectric capacitor on the aluminum oxide film.
10. The method for manufacturing a semiconductor device according to claim 9 , further comprising, between said step of planarizing a surface of the interlayer insulation film and said step of forming an aluminum oxide film, the step of heating the interlayer insulation film to remove moisture from the interlayer insulation film.
11. The method for manufacturing a semiconductor device according to claim 10 , wherein a heat treatment temperature in said step of heating the interlayer insulation film is 650 or lower.
12. The method for manufacturing a semiconductor device according to claim 10 , wherein a heat treatment temperature in said step of heating the aluminum oxide film is not higher than a heat treatment temperature in said step of heating the interlayer insulation film.
13. The method for manufacturing a semiconductor device according to claim 4 , further comprising, prior to said step of forming an interlayer insulation film, the step of forming a transistor to be connected to the ferroelectric capacitor on a surface of the semiconductor substrate.
14. The method for manufacturing a semiconductor device according to claim 9 , further comprising, prior to said step of forming an interlayer insulation film, the step of forming a transistor to be connected to the ferroelectric capacitor on a surface of the semiconductor substrate.
15. The method for manufacturing a semiconductor device according to claim 4 , wherein the aluminum oxide film is formed by a high frequency sputtering method.
16. The method for manufacturing a semiconductor device according to claim 9 , wherein the aluminum oxide film is formed by a high frequency sputtering method.
17. The method for manufacturing a semiconductor device according to claim 4 , wherein said step of forming a ferroelectric capacitor comprises the step of forming a lower electrode including a platinum film.
18. The method for manufacturing a semiconductor device according to claim 9 , wherein said step of forming a ferroelectric capacitor comprises the step of forming a lower electrode including a platinum film.