Semiconductor device with specifically shaped contact holes
View Patent ↗An interlayer insulating film covering a ferroelectric capacitor is formed, and through the interlayer insulating film, contact holes each reaching a capacitor electrode are formed. A wiring connected to the capacitor electrode through the contact hole is further formed above the interlayer insulating film. A planar shape of the contact hole is a regular octagon, a regular rectangle with four angles thereof being rounded, an octagon with a length of each neighboring side thereof being different to each other, a circle, and so forth.
1. A semiconductor device, comprising:
a substrate;
a ferroelectric capacitor formed above said substrate;
an interlayer insulating film which covers said ferroelectric capacitor and through which a hole reaching an electrode of said ferroelectric capacitor is formed;
a wiring formed above said interlayer insulating film and connected to said electrode through said hole, and
a barrier metal film formed between said wiring and said electrode,
a planar shape of said hole being any one type selected from a group consisting of:
(1) a polygon with an interior angle of each angle thereof being obtuse;
(2) a closed curve with a bending direction thereof being constantly inward with respect to said hole; and
(3) a shape which consists of a line segment and a curve with a bending direction thereof being constantly inward with respect to said hole, an angle between a tangent of said curve and said line segment at an intersection of said line segment and said curve being obtuse, and an interior angle of an intersection of two of said line segments being obtuse;
wherein the barrier metal film formed within the contact hole is formed with superior coverage to the contact hole because of the shape of the contact hole, thereby avoiding contact failure and deformation around the contact portion.
2. The semiconductor device according to claim 1 , wherein a shortest diameter of said hole is 1.0 μm or more.
3. The semiconductor device according to claim 1 , wherein said electrode contains a metal of a platinum family or an oxide thereof.
4. The semiconductor device according to claim 1 , wherein a planar shape of said hole is a circle, or a regular polygon whose number of angles is identical to or more than five.
5. The semiconductor device according to claim 1 , wherein a planar shape of said hole is a shape that deconcentrate stress around the hole so that peeling between the electrode and the wiring can be prevented.
6. The semiconductor device according to claim 1 , wherein said wiring is an aluminum wiring.
7. The semiconductor device according to claim 6 , wherein said barrier metal film is a titanium nitride film.